JPS6439379A - Method and device for producing thin film forming parts - Google Patents
Method and device for producing thin film forming partsInfo
- Publication number
- JPS6439379A JPS6439379A JP19535087A JP19535087A JPS6439379A JP S6439379 A JPS6439379 A JP S6439379A JP 19535087 A JP19535087 A JP 19535087A JP 19535087 A JP19535087 A JP 19535087A JP S6439379 A JPS6439379 A JP S6439379A
- Authority
- JP
- Japan
- Prior art keywords
- temp
- gas
- thin film
- substrate
- gas decomposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To control the thickness and quality of the vapor-deposited film as desired by locally heating a gas decomposing member provided in a reaction chamber by a laser beam, and regulating the temp. distribution of the member. CONSTITUTION:Gaseous methane and gaseous hydrogen are supplied into the reaction vessel 10 from gas cylinders 18 through a pipe 16, sucked by a pump 24, and discharged from a gas exhaust port 14. The gaseous reactants introduced at this time are converted into plasma by the action of a coil 28, and the plasma is passed through the gas decomposing member 36. The gas decomposing member 36 is wholly heated to a prescribed temp., and then partially irradiated by the beam from a laser beam source 40 to keep the prescribed part at a high temp. As a result, a thicker film is vapor-deposited on the surface of the substrate 33 placed on a substrate holder 32 as the temp. of the gas decomposing member 36 is increased, and the thickness distribution of the thin film on the substrate 33 can be optionally controlled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19535087A JPH0248627B2 (en) | 1987-08-06 | 1987-08-06 | HAKUMAKUKEISEIBUHINNOSEIZOHOHOOYOBISOCHI |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19535087A JPH0248627B2 (en) | 1987-08-06 | 1987-08-06 | HAKUMAKUKEISEIBUHINNOSEIZOHOHOOYOBISOCHI |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6439379A true JPS6439379A (en) | 1989-02-09 |
| JPH0248627B2 JPH0248627B2 (en) | 1990-10-25 |
Family
ID=16339707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19535087A Expired - Lifetime JPH0248627B2 (en) | 1987-08-06 | 1987-08-06 | HAKUMAKUKEISEIBUHINNOSEIZOHOHOOYOBISOCHI |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248627B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5188229A (en) * | 1991-04-05 | 1993-02-23 | International Paper Company | Compact disc package |
| WO2003023842A1 (en) * | 2001-09-10 | 2003-03-20 | Kabushiki Kaisha Watanabe Shoko | Method and apparatus for forming low permittivity film and electronic device using the film |
| JP2005320585A (en) * | 2004-05-10 | 2005-11-17 | Nippon Itf Kk | Film whose wettability is controlled, method for forming the same and wettability-controlled film-coated article |
| JP2013534275A (en) * | 2010-07-30 | 2013-09-02 | ディアロテック | Method of synthesizing materials, in particular diamond, by chemical vapor deposition and apparatus for applying the method |
| WO2019039533A1 (en) * | 2017-08-25 | 2019-02-28 | セントラル硝子株式会社 | Method for manufacturing diamond substrate |
-
1987
- 1987-08-06 JP JP19535087A patent/JPH0248627B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5188229A (en) * | 1991-04-05 | 1993-02-23 | International Paper Company | Compact disc package |
| WO2003023842A1 (en) * | 2001-09-10 | 2003-03-20 | Kabushiki Kaisha Watanabe Shoko | Method and apparatus for forming low permittivity film and electronic device using the film |
| JP2005320585A (en) * | 2004-05-10 | 2005-11-17 | Nippon Itf Kk | Film whose wettability is controlled, method for forming the same and wettability-controlled film-coated article |
| JP2013534275A (en) * | 2010-07-30 | 2013-09-02 | ディアロテック | Method of synthesizing materials, in particular diamond, by chemical vapor deposition and apparatus for applying the method |
| WO2019039533A1 (en) * | 2017-08-25 | 2019-02-28 | セントラル硝子株式会社 | Method for manufacturing diamond substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0248627B2 (en) | 1990-10-25 |
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