JPS5669210A - Method for depositing thermally decomposed carbon - Google Patents

Method for depositing thermally decomposed carbon

Info

Publication number
JPS5669210A
JPS5669210A JP14499379A JP14499379A JPS5669210A JP S5669210 A JPS5669210 A JP S5669210A JP 14499379 A JP14499379 A JP 14499379A JP 14499379 A JP14499379 A JP 14499379A JP S5669210 A JPS5669210 A JP S5669210A
Authority
JP
Japan
Prior art keywords
substrate
decomposed carbon
thermally decomposed
material gas
downstream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14499379A
Other languages
Japanese (ja)
Inventor
Takane Miyazaki
Shigeki Tomono
Shigeru Tatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP14499379A priority Critical patent/JPS5669210A/en
Publication of JPS5669210A publication Critical patent/JPS5669210A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the efficiency of deposition of thermally decomposed carbon useful as an electrode, etc. on a substrate heated under the flow of a raw material gas, by shifting the heating zone of the substrate gradually from the downstream to the upstream of the material gas flow. CONSTITUTION:A substrate 6 is placed in the main body of the reactor 1, which is provided with an induction coil 4 for substrate heating. The coil 4 can be shifted vertically with a driving motor 3. Raw material gas is introduced into the reactor 1 through an inlet 7, and at the same time, the heating zone of the substrate 6 is shifted gradually from the downstream to the upstream of the material gas flow to effect the continuous deposition of the thermally decomposed carbon on the substrate from the downstream to the upstream side. The process enables the uniform deposition of thermally decomposed carbon to the whole surface of the substrate 6 using a small-scale apparatus, and also enables to deposite the decomposed carbon to a part of the substrate.
JP14499379A 1979-11-09 1979-11-09 Method for depositing thermally decomposed carbon Pending JPS5669210A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14499379A JPS5669210A (en) 1979-11-09 1979-11-09 Method for depositing thermally decomposed carbon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14499379A JPS5669210A (en) 1979-11-09 1979-11-09 Method for depositing thermally decomposed carbon

Publications (1)

Publication Number Publication Date
JPS5669210A true JPS5669210A (en) 1981-06-10

Family

ID=15374972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14499379A Pending JPS5669210A (en) 1979-11-09 1979-11-09 Method for depositing thermally decomposed carbon

Country Status (1)

Country Link
JP (1) JPS5669210A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (en) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk Method for synthesizing carbon film and carbon granule in vapor phase
JPS6155218A (en) * 1984-08-23 1986-03-19 Hinode Kagaku Kogyo Kk Electroconductive potassium titanate fiber and its production
JPS6320480A (en) * 1986-07-14 1988-01-28 Res Dev Corp Of Japan Method and apparatus for surface treatment of powder or fibrous material
JPH02236278A (en) * 1986-07-14 1990-09-19 Res Dev Corp Of Japan Method for ultra-thin film coating of superfine powder or fine fibrous material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491396U (en) * 1972-04-07 1974-01-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491396U (en) * 1972-04-07 1974-01-08

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (en) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk Method for synthesizing carbon film and carbon granule in vapor phase
JPH0333641B2 (en) * 1982-08-13 1991-05-17 Tonen Kk
JPS6155218A (en) * 1984-08-23 1986-03-19 Hinode Kagaku Kogyo Kk Electroconductive potassium titanate fiber and its production
JPH0355412B2 (en) * 1984-08-23 1991-08-23
JPS6320480A (en) * 1986-07-14 1988-01-28 Res Dev Corp Of Japan Method and apparatus for surface treatment of powder or fibrous material
JPH02236278A (en) * 1986-07-14 1990-09-19 Res Dev Corp Of Japan Method for ultra-thin film coating of superfine powder or fine fibrous material
JPH055896B2 (en) * 1986-07-14 1993-01-25 Shingijutsu Jigyodan
JPH0543791B2 (en) * 1986-07-14 1993-07-02 Shingijutsu Kaihatsu Jigyodan

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