JPS6446934A - Detection of quantity of etched surface of solid - Google Patents
Detection of quantity of etched surface of solidInfo
- Publication number
- JPS6446934A JPS6446934A JP20378287A JP20378287A JPS6446934A JP S6446934 A JPS6446934 A JP S6446934A JP 20378287 A JP20378287 A JP 20378287A JP 20378287 A JP20378287 A JP 20378287A JP S6446934 A JPS6446934 A JP S6446934A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- resist
- scale pattern
- depth
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To measure the depth of etching simply and rapidly without using a step measuring device by mounting a resist with an opening and a scale pattern arranged near the opening to the etched surface of a solid and observing the quantity of side etching, employing the scale pattern as a reference. CONSTITUTION:Isotropic Si etching is conducted to a substrate 1 to which a resist 2 and a scale pattern 3 are set up. Since etching progresses in an isotropic manner, an etching region is spread both in the thickness direction and cross direction of the substrate 1 from an opening section in the resist 2. Since a certain relationship holds between the quantity of etching (l) in the cross direction and the depth (d) of a groove at that time, the depth (d) of the groove can be determined when the quantity of side etching (l) is caught. The quantity of side etching (l) can be read by observing the scale pattern 3 and the edge section of the etching region by a light microscope because the edge section of the etching region is viewed from an upper section through the resist 2. Accordingly, the quantity of etching can easily be determined quickly without using a step measuring device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20378287A JPS6446934A (en) | 1987-08-17 | 1987-08-17 | Detection of quantity of etched surface of solid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20378287A JPS6446934A (en) | 1987-08-17 | 1987-08-17 | Detection of quantity of etched surface of solid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6446934A true JPS6446934A (en) | 1989-02-21 |
Family
ID=16479681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20378287A Pending JPS6446934A (en) | 1987-08-17 | 1987-08-17 | Detection of quantity of etched surface of solid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6446934A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317191A (en) * | 1991-08-19 | 1994-05-31 | Mitsubishi Denki Kabushiki Kaisha | Low-melting-point junction material having high-melting-point particles uniformly dispersed therein |
JP2007083341A (en) * | 2005-09-22 | 2007-04-05 | Seiko Epson Corp | Manufacturing method for mems element |
JP2014018871A (en) * | 2012-07-12 | 2014-02-03 | Seiko Epson Corp | Process monitor element, and method for manufacturing mems element |
-
1987
- 1987-08-17 JP JP20378287A patent/JPS6446934A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317191A (en) * | 1991-08-19 | 1994-05-31 | Mitsubishi Denki Kabushiki Kaisha | Low-melting-point junction material having high-melting-point particles uniformly dispersed therein |
JP2007083341A (en) * | 2005-09-22 | 2007-04-05 | Seiko Epson Corp | Manufacturing method for mems element |
JP2014018871A (en) * | 2012-07-12 | 2014-02-03 | Seiko Epson Corp | Process monitor element, and method for manufacturing mems element |
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