JPS6437862A - Manufacture of semiconductor integrated circuit - Google Patents

Manufacture of semiconductor integrated circuit

Info

Publication number
JPS6437862A
JPS6437862A JP62194874A JP19487487A JPS6437862A JP S6437862 A JPS6437862 A JP S6437862A JP 62194874 A JP62194874 A JP 62194874A JP 19487487 A JP19487487 A JP 19487487A JP S6437862 A JPS6437862 A JP S6437862A
Authority
JP
Japan
Prior art keywords
layer
epitaxial
whole
buried
epitaxial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62194874A
Other languages
English (en)
Inventor
Toshiyuki Okoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP62194874A priority Critical patent/JPS6437862A/ja
Publication of JPS6437862A publication Critical patent/JPS6437862A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Integrated Circuits (AREA)
JP62194874A 1987-08-04 1987-08-04 Manufacture of semiconductor integrated circuit Pending JPS6437862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62194874A JPS6437862A (en) 1987-08-04 1987-08-04 Manufacture of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62194874A JPS6437862A (en) 1987-08-04 1987-08-04 Manufacture of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS6437862A true JPS6437862A (en) 1989-02-08

Family

ID=16331746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62194874A Pending JPS6437862A (en) 1987-08-04 1987-08-04 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS6437862A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02215886A (ja) * 1989-02-17 1990-08-28 Taguchi Kenkyusho:Kk 注入工法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02215886A (ja) * 1989-02-17 1990-08-28 Taguchi Kenkyusho:Kk 注入工法

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