JPS6437836A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6437836A JPS6437836A JP19496187A JP19496187A JPS6437836A JP S6437836 A JPS6437836 A JP S6437836A JP 19496187 A JP19496187 A JP 19496187A JP 19496187 A JP19496187 A JP 19496187A JP S6437836 A JPS6437836 A JP S6437836A
- Authority
- JP
- Japan
- Prior art keywords
- film
- photo
- resist
- ion implantation
- brought
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To make sure the execution of ion implantation work by previously forming a photo-resist film having an area smaller than a metallic film patterned and not brought into contact with an edge onto the metallic film. CONSTITUTION:An SiO2 film 12 is shaped onto a semiconductor substrate 11, an Al film 13 is formed and patterned through a photolithographic technique, and a photo-resist pattern 14 is shaped onto the Al film by using the photolithographic technique again. When ions are implanted under the state, the photo- resist 14 on the Al film 13 is changed into a discolored photo-resist 15. Consequently, ion implantation work can be made sure at that time. Since the photo- resist 14 is not brought into contact with the edge of the Al film 13, storage charges by ion implantation generate no defect of Al.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19496187A JPS6437836A (en) | 1987-08-03 | 1987-08-03 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19496187A JPS6437836A (en) | 1987-08-03 | 1987-08-03 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6437836A true JPS6437836A (en) | 1989-02-08 |
Family
ID=16333210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19496187A Pending JPS6437836A (en) | 1987-08-03 | 1987-08-03 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6437836A (en) |
-
1987
- 1987-08-03 JP JP19496187A patent/JPS6437836A/en active Pending
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