JPS6435405A - Light waveguide mutual connection circuit - Google Patents
Light waveguide mutual connection circuitInfo
- Publication number
- JPS6435405A JPS6435405A JP63157020A JP15702088A JPS6435405A JP S6435405 A JPS6435405 A JP S6435405A JP 63157020 A JP63157020 A JP 63157020A JP 15702088 A JP15702088 A JP 15702088A JP S6435405 A JPS6435405 A JP S6435405A
- Authority
- JP
- Japan
- Prior art keywords
- light guide
- thin film
- plane
- dielectric layer
- flat face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/066,930 US4762382A (en) | 1987-06-29 | 1987-06-29 | Optical interconnect circuit for GaAs optoelectronics and Si VLSI/VHSIC |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435405A true JPS6435405A (en) | 1989-02-06 |
Family
ID=22072642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63157020A Pending JPS6435405A (en) | 1987-06-29 | 1988-06-27 | Light waveguide mutual connection circuit |
Country Status (3)
Country | Link |
---|---|
US (1) | US4762382A (ja) |
EP (1) | EP0297483A3 (ja) |
JP (1) | JPS6435405A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6458614B1 (en) | 1998-03-26 | 2002-10-01 | Murata Manufacturing Co., | Opto-electronic integrated circuit |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5159700A (en) * | 1984-01-16 | 1992-10-27 | Texas Instruments Incorporated | Substrate with optical communication systems between chips mounted thereon and monolithic integration of optical I/O on silicon substrates |
US5163118A (en) * | 1986-11-10 | 1992-11-10 | The United States Of America As Represented By The Secretary Of The Air Force | Lattice mismatched hetrostructure optical waveguide |
US4877301A (en) * | 1987-10-09 | 1989-10-31 | Ricoh Company, Ltd. | Covered optical waveguide having an inlet opening |
US4989934A (en) * | 1987-11-13 | 1991-02-05 | Kopin Corporation | Monolithic integrated transceiver of III-V devices on silicon |
US4890895A (en) * | 1987-11-13 | 1990-01-02 | Kopin Corporation | Optoelectronic interconnections for III-V devices on silicon |
DE3833311A1 (de) * | 1988-09-30 | 1990-04-19 | Siemens Ag | Optoelektronische sende- und empfangsvorrichtung |
US4973125A (en) * | 1989-08-25 | 1990-11-27 | National Research Council Of Canada | All optical self limiter for fiber optics |
DE3932369A1 (de) * | 1989-09-28 | 1991-04-11 | Licentia Gmbh | Lichtwellenleiteranordnung |
EP0419767B1 (de) * | 1989-09-29 | 1993-11-24 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Körpers aus Silizium |
US5059475A (en) * | 1990-06-29 | 1991-10-22 | Photonic Integration Research, Inc. | Apparatus and method of forming optical waveguides on metalized substrates |
US5046800A (en) * | 1990-10-09 | 1991-09-10 | At&T Bell Laboratories | Article comprising a passive optical waveguide |
FR2676126B1 (fr) * | 1991-04-30 | 1993-07-23 | France Telecom | Dispositif optoelectronique a guide optique et photodetecteur integres. |
EP0536829B1 (en) * | 1991-10-08 | 1997-02-05 | Koninklijke Philips Electronics N.V. | Optoelectronic semiconductor device comprising a waveguide and method of manufacturing such a device |
US5148504A (en) * | 1991-10-16 | 1992-09-15 | At&T Bell Laboratories | Optical integrated circuit designed to operate by use of photons |
US5208879A (en) * | 1991-10-18 | 1993-05-04 | International Business Machines Corporation | Optical signal distribution system |
US5237434A (en) * | 1991-11-05 | 1993-08-17 | Mcnc | Microelectronic module having optical and electrical interconnects |
US5394490A (en) * | 1992-08-11 | 1995-02-28 | Hitachi, Ltd. | Semiconductor device having an optical waveguide interposed in the space between electrode members |
GB9225273D0 (en) * | 1992-12-03 | 1993-01-27 | Int Computers Ltd | Electronic circuit assemblies |
GB9225274D0 (en) * | 1992-12-03 | 1993-01-27 | Int Computers Ltd | Electronic circuit assemblies |
US5402511A (en) * | 1993-06-11 | 1995-03-28 | The United States Of America As Represented By The Secretary Of The Army | Method of forming an improved tapered waveguide by selectively irradiating a viscous adhesive resin prepolymer with ultra-violet light |
US5420953A (en) * | 1994-02-17 | 1995-05-30 | The Whitaker Corporation | Optoelectronic integration of holograms using (110) oriented silicon on (100) oriented silicon waferboard |
US5519363A (en) * | 1994-05-31 | 1996-05-21 | The Whitaker Corporation | Controlled impedance lines connected to optoelectronic devices |
WO1996000996A1 (en) * | 1994-06-30 | 1996-01-11 | The Whitaker Corporation | Planar hybrid optical amplifier |
JP3828179B2 (ja) * | 1995-05-12 | 2006-10-04 | 富士通株式会社 | 半導体光検出装置およびその製造方法 |
SE511000C2 (sv) * | 1996-09-06 | 1999-07-19 | Ericsson Telefon Ab L M | Förfarande och anordning för att anordna ett vågledarmönster i en donkropp |
US6498870B1 (en) | 1998-04-20 | 2002-12-24 | Omm, Inc. | Micromachined optomechanical switches |
US6449406B1 (en) | 1999-05-28 | 2002-09-10 | Omm, Inc. | Micromachined optomechanical switching devices |
US6445840B1 (en) | 1999-05-28 | 2002-09-03 | Omm, Inc. | Micromachined optical switching devices |
US6453083B1 (en) | 1999-05-28 | 2002-09-17 | Anis Husain | Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring |
US6445841B1 (en) | 1999-05-28 | 2002-09-03 | Omm, Inc. | Optomechanical matrix switches including collimator arrays |
US6539157B2 (en) * | 2000-12-28 | 2003-03-25 | Honeywell Advanced Circuits, Inc. | Layered circuit boards and methods of production thereof |
CN1589513A (zh) * | 2001-09-20 | 2005-03-02 | 阿拉巴玛州立大学伯明翰研究基金会 | 中红外微芯片激光器:带有可饱和吸收材料的ZnS:Cr2+激光器 |
DE10261276B4 (de) | 2002-12-27 | 2005-12-01 | Eisenmann Maschinenbau Gmbh & Co. Kg | Vorlagebehälter für pulverförmige Medien |
DE102005004582A1 (de) | 2005-01-26 | 2006-07-27 | Philipps-Universität Marburg | III/V-Halbleiter |
DE102006061586B4 (de) * | 2006-12-27 | 2009-01-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verbindungsnetzwerk zwischen Halbleiterstrukturen sowie damit ausgestatteter Schaltkreis und Verfahren zur Datenübertragung |
US8290325B2 (en) * | 2008-06-30 | 2012-10-16 | Intel Corporation | Waveguide photodetector device and manufacturing method thereof |
US8253211B2 (en) * | 2008-09-24 | 2012-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor sensor structures with reduced dislocation defect densities |
US8842946B1 (en) * | 2011-04-01 | 2014-09-23 | Kotura, Inc. | Light sensor having reduced dark current |
DE102011016366B4 (de) | 2011-04-07 | 2018-09-06 | Nasp Iii/V Gmbh | III/V-Si-Template, dessen Verwendung und Verfahren zu dessen Herstellung |
US9595438B2 (en) | 2011-09-12 | 2017-03-14 | Nasp Iii/V Gmbh | Method for producing a III/V Si template |
KR102125277B1 (ko) * | 2012-06-26 | 2020-06-22 | 삼성전자주식회사 | 광 집적 회로, 이를 포함하는 반도체 장치 및 그 제조 방법 |
DE112013007072T5 (de) * | 2013-06-28 | 2016-01-28 | Intel Corporation | Nano-Strukturen und Nano-Merkmale mit Si (111)-Ebenen auf Si (100)-Wafer für III-N Epitaxie |
US10571629B1 (en) * | 2018-08-17 | 2020-02-25 | University Of Southampton | Waveguide for an integrated photonic device |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3879606A (en) * | 1973-09-24 | 1975-04-22 | Texas Instruments Inc | Light projection coupling of semiconductor type devices through the use of thermally grown or deposited SiO{HD 2 {B films |
JPS6051682B2 (ja) * | 1977-12-27 | 1985-11-15 | 沖電気工業株式会社 | 光モ−ド弁別器 |
JPS5810721B2 (ja) * | 1978-06-10 | 1983-02-26 | 日本電信電話株式会社 | 薄膜光素子の製造方法 |
US4178197A (en) * | 1979-03-05 | 1979-12-11 | International Business Machines Corporation | Formation of epitaxial tunnels utilizing oriented growth techniques |
US4426440A (en) * | 1982-11-18 | 1984-01-17 | The United States Of America As Represented By The Secretary Of The Army | Integrated optical grating device by thermal SiO2 growth on Si |
JPS59159105A (ja) * | 1983-03-02 | 1984-09-08 | Hitachi Ltd | 光導波路 |
FR2548220B1 (fr) * | 1983-07-01 | 1987-07-31 | Labo Electronique Physique | Guide d'onde lumineuse sur materiau semi-conducteur |
US4652290A (en) * | 1983-07-05 | 1987-03-24 | Motorola, Inc. | Method for making optical channel waveguides and product manufactured thereby |
JP2594895B2 (ja) * | 1983-07-08 | 1997-03-26 | 株式会社日立製作所 | 光集積回路素子の製造方法 |
US4585299A (en) * | 1983-07-19 | 1986-04-29 | Fairchild Semiconductor Corporation | Process for fabricating optical wave-guiding components and components made by the process |
US4701008A (en) * | 1984-08-10 | 1987-10-20 | Motorola, Inc. | Optical waveguide including superstrate of niobium or silicon oxynitride and method of making same |
-
1987
- 1987-06-29 US US07/066,930 patent/US4762382A/en not_active Expired - Lifetime
-
1988
- 1988-06-27 JP JP63157020A patent/JPS6435405A/ja active Pending
- 1988-06-27 EP EP88110218A patent/EP0297483A3/en not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6458614B1 (en) | 1998-03-26 | 2002-10-01 | Murata Manufacturing Co., | Opto-electronic integrated circuit |
Also Published As
Publication number | Publication date |
---|---|
EP0297483A3 (en) | 1990-07-04 |
EP0297483A2 (en) | 1989-01-04 |
US4762382A (en) | 1988-08-09 |
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