JPS6428644A - Production of photomask blank - Google Patents

Production of photomask blank

Info

Publication number
JPS6428644A
JPS6428644A JP18411987A JP18411987A JPS6428644A JP S6428644 A JPS6428644 A JP S6428644A JP 18411987 A JP18411987 A JP 18411987A JP 18411987 A JP18411987 A JP 18411987A JP S6428644 A JPS6428644 A JP S6428644A
Authority
JP
Japan
Prior art keywords
light shielding
blank
shielding film
film
titled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18411987A
Other languages
Japanese (ja)
Other versions
JPH0690502B2 (en
Inventor
Keiji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP18411987A priority Critical patent/JPH0690502B2/en
Publication of JPS6428644A publication Critical patent/JPS6428644A/en
Publication of JPH0690502B2 publication Critical patent/JPH0690502B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To improve the mechanical durability of a light shielding film, and to reduce the refractive index of the titled blank by forming the light shielding film composed of a chromium layer on a glass substrate by a vacuum depositing method, etc., followed by subjecting the shading film to plasma treatment. CONSTITUTION:The light shielding film composed of the chromium layer or a chromium compd. is formed on the glass substrate by the vacuum depositing or a sputtering method. Next, the substrate 12 mounted with a metallic chrom layer thereon is disposed on a table 22 of a plasma surface treating apparatus 20. And, said plate 12 is subjected to the plasma treatment by a high frequency discharge generated between an upper electrode 24 and a lower electrode 23 in an atmosphere of oxygen and nitrogen gas, etc., to form an oxide film or a nitride film. Subsequently, the resist film is formed to obtain the titled blank. Accordingly, as the light shielding film is treated with the plasma, the mechanical durability of the light shielding film is improved, and the refractive index of the titled blank is reduced, and the etching aptitude of said blank can be improved.
JP18411987A 1987-07-23 1987-07-23 Photomask blank manufacturing method Expired - Lifetime JPH0690502B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18411987A JPH0690502B2 (en) 1987-07-23 1987-07-23 Photomask blank manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18411987A JPH0690502B2 (en) 1987-07-23 1987-07-23 Photomask blank manufacturing method

Publications (2)

Publication Number Publication Date
JPS6428644A true JPS6428644A (en) 1989-01-31
JPH0690502B2 JPH0690502B2 (en) 1994-11-14

Family

ID=16147709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18411987A Expired - Lifetime JPH0690502B2 (en) 1987-07-23 1987-07-23 Photomask blank manufacturing method

Country Status (1)

Country Link
JP (1) JPH0690502B2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054674A (en) * 1973-09-17 1975-05-14
JPS5140874A (en) * 1974-10-04 1976-04-06 Toppan Printing Co Ltd
JPS5876831A (en) * 1981-11-02 1983-05-10 Konishiroku Photo Ind Co Ltd Metallic image forming material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054674A (en) * 1973-09-17 1975-05-14
JPS5140874A (en) * 1974-10-04 1976-04-06 Toppan Printing Co Ltd
JPS5876831A (en) * 1981-11-02 1983-05-10 Konishiroku Photo Ind Co Ltd Metallic image forming material

Also Published As

Publication number Publication date
JPH0690502B2 (en) 1994-11-14

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