JPS642357A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS642357A
JPS642357A JP62158015A JP15801587A JPS642357A JP S642357 A JPS642357 A JP S642357A JP 62158015 A JP62158015 A JP 62158015A JP 15801587 A JP15801587 A JP 15801587A JP S642357 A JPS642357 A JP S642357A
Authority
JP
Japan
Prior art keywords
electrode
layer
metallic
insulating film
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62158015A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0557744B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
JPH012357A (ja
Inventor
Yukio Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP62158015A priority Critical patent/JPS642357A/ja
Publication of JPH012357A publication Critical patent/JPH012357A/ja
Publication of JPS642357A publication Critical patent/JPS642357A/ja
Publication of JPH0557744B2 publication Critical patent/JPH0557744B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP62158015A 1987-06-25 1987-06-25 Manufacture of semiconductor device Granted JPS642357A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62158015A JPS642357A (en) 1987-06-25 1987-06-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62158015A JPS642357A (en) 1987-06-25 1987-06-25 Manufacture of semiconductor device

Publications (3)

Publication Number Publication Date
JPH012357A JPH012357A (ja) 1989-01-06
JPS642357A true JPS642357A (en) 1989-01-06
JPH0557744B2 JPH0557744B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-24

Family

ID=15662408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62158015A Granted JPS642357A (en) 1987-06-25 1987-06-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS642357A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7368380B2 (en) 2003-06-09 2008-05-06 Fuji Electric Device Technology Co., Ltd. Method of manufacturing semiconductor device
JP2011091424A (ja) * 2010-12-17 2011-05-06 Mitsubishi Electric Corp 半導体装置
US10426306B2 (en) 2016-01-22 2019-10-01 Dyson Technology Limited Brushbar, cleaner head and method of manufacture of a brushbar
CN111081787A (zh) * 2019-11-20 2020-04-28 广微集成技术（深圳）有限公司 晶圆制备方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7368380B2 (en) 2003-06-09 2008-05-06 Fuji Electric Device Technology Co., Ltd. Method of manufacturing semiconductor device
JP2011091424A (ja) * 2010-12-17 2011-05-06 Mitsubishi Electric Corp 半導体装置
US10426306B2 (en) 2016-01-22 2019-10-01 Dyson Technology Limited Brushbar, cleaner head and method of manufacture of a brushbar
CN111081787A (zh) * 2019-11-20 2020-04-28 广微集成技术（深圳）有限公司 晶圆制备方法

Also Published As

Publication number Publication date
JPH0557744B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-24

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