JPS6420609A - Process control for semiconductor - Google Patents
Process control for semiconductorInfo
- Publication number
- JPS6420609A JPS6420609A JP17618387A JP17618387A JPS6420609A JP S6420609 A JPS6420609 A JP S6420609A JP 17618387 A JP17618387 A JP 17618387A JP 17618387 A JP17618387 A JP 17618387A JP S6420609 A JPS6420609 A JP S6420609A
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- substrate
- impurities
- terminals
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To control rapidly the shape of grooves formed on a substrate and the doping process of impurities in the inner surface thereof, by an easy measuring method of resistivity. CONSTITUTION:Grooves 2 are provided on a p-semiconductor substrate 1 and an n<+> layer 3 is formed by being doped with impurities. A region 4 having close-set grooves 2 of n-doping is then formed, and on the surface of the substrate 1 thereabout, connection regions 5-12 are formed. A specified potential is applied to terminals 5 and 9 and the potential differences between terminals 8 and 12 and between terminals 6 and 10 are measured to control the measured values to be within the range of specifications. According to this constitution, the shape of grooves provided in a substrate and the doping process of the impurities in the inner surface thereof can be controlled easily and rapidly.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17618387A JPS6420609A (en) | 1987-07-15 | 1987-07-15 | Process control for semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17618387A JPS6420609A (en) | 1987-07-15 | 1987-07-15 | Process control for semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420609A true JPS6420609A (en) | 1989-01-24 |
Family
ID=16009102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17618387A Pending JPS6420609A (en) | 1987-07-15 | 1987-07-15 | Process control for semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420609A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012064807A (en) * | 2010-09-16 | 2012-03-29 | Elpida Memory Inc | Method of manufacturing semiconductor device |
-
1987
- 1987-07-15 JP JP17618387A patent/JPS6420609A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012064807A (en) * | 2010-09-16 | 2012-03-29 | Elpida Memory Inc | Method of manufacturing semiconductor device |
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