JPS55117233A - Semiconductor device and manufacturing thereof - Google Patents
Semiconductor device and manufacturing thereofInfo
- Publication number
- JPS55117233A JPS55117233A JP2371179A JP2371179A JPS55117233A JP S55117233 A JPS55117233 A JP S55117233A JP 2371179 A JP2371179 A JP 2371179A JP 2371179 A JP2371179 A JP 2371179A JP S55117233 A JPS55117233 A JP S55117233A
- Authority
- JP
- Japan
- Prior art keywords
- impurity
- semiconductor device
- diffused
- diffused layer
- covalent bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000012535 impurity Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System further characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2252—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase
Abstract
PURPOSE:To eliminate strain or dislocation and obtain a semiconductor device of good electric properties, by using Ge and an impurity having covalent bonding smaller than the covalent bonding radius of Si to produce a diffused layer on an Si substrate. CONSTITUTION:A diffused layer 12 is produced in a surface part of an Si substrate 11. A protective film 14 is coated on a doped layer 13 on the diffused layer 12 to prevent an impurity from being diffused out. A semiconductor device 10 is thus manufactured. A mixture of Ge and an impurity such as P or B having a smaller convalent bonding radius than Si is used for the diffused layer 12 depending on an electroconductive type to be obtained. The ratio of the diffused quantity of the impurity to that of the Ge in the diffused layer 12 is prescribed at 1.30 or less. The atom bonding radius is made uniform by the impurity of smaller covalent bonding radius and the Ge of larger covalent bonding radius. This results in making the semiconductor device undefective.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2371179A JPS55117233A (en) | 1979-03-01 | 1979-03-01 | Semiconductor device and manufacturing thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2371179A JPS55117233A (en) | 1979-03-01 | 1979-03-01 | Semiconductor device and manufacturing thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55117233A true JPS55117233A (en) | 1980-09-09 |
Family
ID=12117921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2371179A Pending JPS55117233A (en) | 1979-03-01 | 1979-03-01 | Semiconductor device and manufacturing thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55117233A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5095358A (en) * | 1990-04-18 | 1992-03-10 | National Semiconductor Corporation | Application of electronic properties of germanium to inhibit n-type or p-type diffusion in silicon |
US5142641A (en) * | 1988-03-23 | 1992-08-25 | Fujitsu Limited | CMOS structure for eliminating latch-up of parasitic thyristor |
-
1979
- 1979-03-01 JP JP2371179A patent/JPS55117233A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5142641A (en) * | 1988-03-23 | 1992-08-25 | Fujitsu Limited | CMOS structure for eliminating latch-up of parasitic thyristor |
US5095358A (en) * | 1990-04-18 | 1992-03-10 | National Semiconductor Corporation | Application of electronic properties of germanium to inhibit n-type or p-type diffusion in silicon |
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