JPS641957Y2 - - Google Patents
Info
- Publication number
- JPS641957Y2 JPS641957Y2 JP15023985U JP15023985U JPS641957Y2 JP S641957 Y2 JPS641957 Y2 JP S641957Y2 JP 15023985 U JP15023985 U JP 15023985U JP 15023985 U JP15023985 U JP 15023985U JP S641957 Y2 JPS641957 Y2 JP S641957Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- electrode plate
- quartz glass
- substrate
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 20
- 238000007142 ring opening reaction Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 description 26
- 238000005229 chemical vapour deposition Methods 0.000 description 24
- 239000010408 film Substances 0.000 description 18
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 11
- 230000003287 optical effect Effects 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000012544 monitoring process Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 6
- 238000007664 blowing Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000003745 diagnosis Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001443 photoexcitation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000012265 solid product Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023985U JPS641957Y2 (enrdf_load_stackoverflow) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023985U JPS641957Y2 (enrdf_load_stackoverflow) | 1985-09-30 | 1985-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6260255U JPS6260255U (enrdf_load_stackoverflow) | 1987-04-14 |
| JPS641957Y2 true JPS641957Y2 (enrdf_load_stackoverflow) | 1989-01-18 |
Family
ID=31066200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15023985U Expired JPS641957Y2 (enrdf_load_stackoverflow) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641957Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-09-30 JP JP15023985U patent/JPS641957Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6260255U (enrdf_load_stackoverflow) | 1987-04-14 |
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