JPS641939B2 - - Google Patents

Info

Publication number
JPS641939B2
JPS641939B2 JP58181026A JP18102683A JPS641939B2 JP S641939 B2 JPS641939 B2 JP S641939B2 JP 58181026 A JP58181026 A JP 58181026A JP 18102683 A JP18102683 A JP 18102683A JP S641939 B2 JPS641939 B2 JP S641939B2
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
oxide film
nitride film
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58181026A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6072254A (ja
Inventor
Michihiro Inoe
Hideaki Sadamatsu
Akira Matsuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58181026A priority Critical patent/JPS6072254A/ja
Publication of JPS6072254A publication Critical patent/JPS6072254A/ja
Publication of JPS641939B2 publication Critical patent/JPS641939B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP58181026A 1983-09-28 1983-09-28 半導体装置 Granted JPS6072254A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58181026A JPS6072254A (ja) 1983-09-28 1983-09-28 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58181026A JPS6072254A (ja) 1983-09-28 1983-09-28 半導体装置

Publications (2)

Publication Number Publication Date
JPS6072254A JPS6072254A (ja) 1985-04-24
JPS641939B2 true JPS641939B2 (enExample) 1989-01-13

Family

ID=16093463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58181026A Granted JPS6072254A (ja) 1983-09-28 1983-09-28 半導体装置

Country Status (1)

Country Link
JP (1) JPS6072254A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0693485B2 (ja) * 1985-11-29 1994-11-16 日本電装株式会社 半導体装置
US4853758A (en) * 1987-08-12 1989-08-01 American Telephone And Telegraph Company, At&T Bell Laboratories Laser-blown links

Also Published As

Publication number Publication date
JPS6072254A (ja) 1985-04-24

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