JPS6417408U - - Google Patents

Info

Publication number
JPS6417408U
JPS6417408U JP11163287U JP11163287U JPS6417408U JP S6417408 U JPS6417408 U JP S6417408U JP 11163287 U JP11163287 U JP 11163287U JP 11163287 U JP11163287 U JP 11163287U JP S6417408 U JPS6417408 U JP S6417408U
Authority
JP
Japan
Prior art keywords
light
light beam
measured
light spot
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11163287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11163287U priority Critical patent/JPS6417408U/ja
Publication of JPS6417408U publication Critical patent/JPS6417408U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP11163287U 1987-07-21 1987-07-21 Pending JPS6417408U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11163287U JPS6417408U (en, 2012) 1987-07-21 1987-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11163287U JPS6417408U (en, 2012) 1987-07-21 1987-07-21

Publications (1)

Publication Number Publication Date
JPS6417408U true JPS6417408U (en, 2012) 1989-01-27

Family

ID=31349850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11163287U Pending JPS6417408U (en, 2012) 1987-07-21 1987-07-21

Country Status (1)

Country Link
JP (1) JPS6417408U (en, 2012)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111858A (en) * 1978-02-21 1979-09-01 Minolta Camera Co Ltd Distance detector
JPS60253814A (ja) * 1984-05-31 1985-12-14 Hoya Corp 非接触変位検出装置
JPS61210902A (ja) * 1985-03-15 1986-09-19 Toshiba Corp 試料面高さ測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111858A (en) * 1978-02-21 1979-09-01 Minolta Camera Co Ltd Distance detector
JPS60253814A (ja) * 1984-05-31 1985-12-14 Hoya Corp 非接触変位検出装置
JPS61210902A (ja) * 1985-03-15 1986-09-19 Toshiba Corp 試料面高さ測定装置

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