JPS6416944A - Electrostatic capacity type pressure sensor - Google Patents
Electrostatic capacity type pressure sensorInfo
- Publication number
- JPS6416944A JPS6416944A JP17323887A JP17323887A JPS6416944A JP S6416944 A JPS6416944 A JP S6416944A JP 17323887 A JP17323887 A JP 17323887A JP 17323887 A JP17323887 A JP 17323887A JP S6416944 A JPS6416944 A JP S6416944A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- thickness
- sensor
- sensitivity
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17323887A JPH0746070B2 (ja) | 1987-07-10 | 1987-07-10 | 静電溶量型圧力センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17323887A JPH0746070B2 (ja) | 1987-07-10 | 1987-07-10 | 静電溶量型圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6416944A true JPS6416944A (en) | 1989-01-20 |
JPH0746070B2 JPH0746070B2 (ja) | 1995-05-17 |
Family
ID=15956715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17323887A Expired - Lifetime JPH0746070B2 (ja) | 1987-07-10 | 1987-07-10 | 静電溶量型圧力センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0746070B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009008693A (ja) * | 1997-12-23 | 2009-01-15 | Inficon Gmbh | 容量式の真空測定セル |
-
1987
- 1987-07-10 JP JP17323887A patent/JPH0746070B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009008693A (ja) * | 1997-12-23 | 2009-01-15 | Inficon Gmbh | 容量式の真空測定セル |
Also Published As
Publication number | Publication date |
---|---|
JPH0746070B2 (ja) | 1995-05-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 13 Free format text: PAYMENT UNTIL: 20080517 |