JPS6416944A - Electrostatic capacity type pressure sensor - Google Patents

Electrostatic capacity type pressure sensor

Info

Publication number
JPS6416944A
JPS6416944A JP17323887A JP17323887A JPS6416944A JP S6416944 A JPS6416944 A JP S6416944A JP 17323887 A JP17323887 A JP 17323887A JP 17323887 A JP17323887 A JP 17323887A JP S6416944 A JPS6416944 A JP S6416944A
Authority
JP
Japan
Prior art keywords
diaphragm
thickness
sensor
sensitivity
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17323887A
Other languages
English (en)
Other versions
JPH0746070B2 (ja
Inventor
Shigeki Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17323887A priority Critical patent/JPH0746070B2/ja
Publication of JPS6416944A publication Critical patent/JPS6416944A/ja
Publication of JPH0746070B2 publication Critical patent/JPH0746070B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP17323887A 1987-07-10 1987-07-10 静電溶量型圧力センサ Expired - Lifetime JPH0746070B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17323887A JPH0746070B2 (ja) 1987-07-10 1987-07-10 静電溶量型圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17323887A JPH0746070B2 (ja) 1987-07-10 1987-07-10 静電溶量型圧力センサ

Publications (2)

Publication Number Publication Date
JPS6416944A true JPS6416944A (en) 1989-01-20
JPH0746070B2 JPH0746070B2 (ja) 1995-05-17

Family

ID=15956715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17323887A Expired - Lifetime JPH0746070B2 (ja) 1987-07-10 1987-07-10 静電溶量型圧力センサ

Country Status (1)

Country Link
JP (1) JPH0746070B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009008693A (ja) * 1997-12-23 2009-01-15 Inficon Gmbh 容量式の真空測定セル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009008693A (ja) * 1997-12-23 2009-01-15 Inficon Gmbh 容量式の真空測定セル

Also Published As

Publication number Publication date
JPH0746070B2 (ja) 1995-05-17

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