JPS6416956A - Humidity sensing element - Google Patents
Humidity sensing elementInfo
- Publication number
- JPS6416956A JPS6416956A JP17329387A JP17329387A JPS6416956A JP S6416956 A JPS6416956 A JP S6416956A JP 17329387 A JP17329387 A JP 17329387A JP 17329387 A JP17329387 A JP 17329387A JP S6416956 A JPS6416956 A JP S6416956A
- Authority
- JP
- Japan
- Prior art keywords
- sensing film
- insulating layer
- substrate
- film
- bridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To realize high detection sensitivity, fast response, operation with low power consumption, etc., by forming a bridge, etc., of two layers, i.e. an insulating layer and a sensing film. CONSTITUTION:The thin film insulating layer 2 and sensing film 4 are formed in a bridge shape on a substrate 1 and then the crystal-axial anisotropic etching of Si of the substrate 1 is carried out to form a hollow structure between the substrate 1 and sensing film/insulating layer bridge part 3 by etching under the bridge part 3, thereby obtaining excellent mechanical strength and superior heat insulation. Further, an electrode 5 is formed on the sensing film 4 and used for the self-heating or electric resistance evaluation of the film. Thus, the high-sensitivity detection, fast response, operation with low power consumption, etc., are realized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17329387A JPS6416956A (en) | 1987-07-10 | 1987-07-10 | Humidity sensing element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17329387A JPS6416956A (en) | 1987-07-10 | 1987-07-10 | Humidity sensing element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416956A true JPS6416956A (en) | 1989-01-20 |
Family
ID=15957759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17329387A Pending JPS6416956A (en) | 1987-07-10 | 1987-07-10 | Humidity sensing element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416956A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516539A (en) * | 1999-12-08 | 2003-05-13 | ゼンジリオン アクチエンゲゼルシャフト | Capacitive sensor |
| US8633047B2 (en) | 2011-09-02 | 2014-01-21 | Sensirion Ag | Method for manufacturing a sensor chip |
-
1987
- 1987-07-10 JP JP17329387A patent/JPS6416956A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003516539A (en) * | 1999-12-08 | 2003-05-13 | ゼンジリオン アクチエンゲゼルシャフト | Capacitive sensor |
| US8633047B2 (en) | 2011-09-02 | 2014-01-21 | Sensirion Ag | Method for manufacturing a sensor chip |
| US9140740B2 (en) | 2011-09-02 | 2015-09-22 | Sensirion Ag | Sensor chip and method for manufacturing a sensor chip |
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