JPS5669511A - Displacement detecting device - Google Patents

Displacement detecting device

Info

Publication number
JPS5669511A
JPS5669511A JP14628679A JP14628679A JPS5669511A JP S5669511 A JPS5669511 A JP S5669511A JP 14628679 A JP14628679 A JP 14628679A JP 14628679 A JP14628679 A JP 14628679A JP S5669511 A JPS5669511 A JP S5669511A
Authority
JP
Japan
Prior art keywords
electrode
moving electrode
fixed electrode
displacement
detecting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14628679A
Other languages
Japanese (ja)
Other versions
JPS6140054B2 (en
Inventor
Hideki Kuwayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Hokushin Electric Works Ltd
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokushin Electric Works Ltd, Yokogawa Hokushin Electric Corp filed Critical Hokushin Electric Works Ltd
Priority to JP14628679A priority Critical patent/JPS5669511A/en
Publication of JPS5669511A publication Critical patent/JPS5669511A/en
Publication of JPS6140054B2 publication Critical patent/JPS6140054B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To improve the linearlity of the output with respect to the displacement by making larger the space of a fixed electrode in a side where the moving electrode is displaced than that with respect to other fixed electrode in a displacement detecting device for detecting the change of the electrostatic capacity.
CONSTITUTION: When the pressure from outside is applied to a diaphragm 28, the pressure is transferred to the moving electrode 17 through sealed fluid. The space d1 between a fixed electrode 25 in a direction of the moving electrode being displaced and a center part of the moving electrode 17 is selected more largely than the space d2 between the center part of the moving electrode 17 and the fixed electrode 26. In accordance with the change of the electrostatic capacity between the moving electrode 17 and the fixed electrode 22, 26, the displacement is detected.
COPYRIGHT: (C)1981,JPO&Japio
JP14628679A 1979-11-12 1979-11-12 Displacement detecting device Granted JPS5669511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14628679A JPS5669511A (en) 1979-11-12 1979-11-12 Displacement detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14628679A JPS5669511A (en) 1979-11-12 1979-11-12 Displacement detecting device

Publications (2)

Publication Number Publication Date
JPS5669511A true JPS5669511A (en) 1981-06-10
JPS6140054B2 JPS6140054B2 (en) 1986-09-06

Family

ID=15404258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14628679A Granted JPS5669511A (en) 1979-11-12 1979-11-12 Displacement detecting device

Country Status (1)

Country Link
JP (1) JPS5669511A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58191512U (en) * 1982-06-15 1983-12-20 横河電機株式会社 Displacement/capacitance conversion device
JPH06167351A (en) * 1991-06-27 1994-06-14 Dresser Ind Inc Control method of nonlinearity of change device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03109448U (en) * 1990-02-23 1991-11-11

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58191512U (en) * 1982-06-15 1983-12-20 横河電機株式会社 Displacement/capacitance conversion device
JPH0120645Y2 (en) * 1982-06-15 1989-06-21
JPH06167351A (en) * 1991-06-27 1994-06-14 Dresser Ind Inc Control method of nonlinearity of change device

Also Published As

Publication number Publication date
JPS6140054B2 (en) 1986-09-06

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