JPS5669511A - Displacement detecting device - Google Patents
Displacement detecting deviceInfo
- Publication number
- JPS5669511A JPS5669511A JP14628679A JP14628679A JPS5669511A JP S5669511 A JPS5669511 A JP S5669511A JP 14628679 A JP14628679 A JP 14628679A JP 14628679 A JP14628679 A JP 14628679A JP S5669511 A JPS5669511 A JP S5669511A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- moving electrode
- fixed electrode
- displacement
- detecting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve the linearlity of the output with respect to the displacement by making larger the space of a fixed electrode in a side where the moving electrode is displaced than that with respect to other fixed electrode in a displacement detecting device for detecting the change of the electrostatic capacity.
CONSTITUTION: When the pressure from outside is applied to a diaphragm 28, the pressure is transferred to the moving electrode 17 through sealed fluid. The space d1 between a fixed electrode 25 in a direction of the moving electrode being displaced and a center part of the moving electrode 17 is selected more largely than the space d2 between the center part of the moving electrode 17 and the fixed electrode 26. In accordance with the change of the electrostatic capacity between the moving electrode 17 and the fixed electrode 22, 26, the displacement is detected.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14628679A JPS5669511A (en) | 1979-11-12 | 1979-11-12 | Displacement detecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14628679A JPS5669511A (en) | 1979-11-12 | 1979-11-12 | Displacement detecting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5669511A true JPS5669511A (en) | 1981-06-10 |
JPS6140054B2 JPS6140054B2 (en) | 1986-09-06 |
Family
ID=15404258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14628679A Granted JPS5669511A (en) | 1979-11-12 | 1979-11-12 | Displacement detecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5669511A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58191512U (en) * | 1982-06-15 | 1983-12-20 | 横河電機株式会社 | Displacement/capacitance conversion device |
JPH06167351A (en) * | 1991-06-27 | 1994-06-14 | Dresser Ind Inc | Control method of nonlinearity of change device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03109448U (en) * | 1990-02-23 | 1991-11-11 |
-
1979
- 1979-11-12 JP JP14628679A patent/JPS5669511A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58191512U (en) * | 1982-06-15 | 1983-12-20 | 横河電機株式会社 | Displacement/capacitance conversion device |
JPH0120645Y2 (en) * | 1982-06-15 | 1989-06-21 | ||
JPH06167351A (en) * | 1991-06-27 | 1994-06-14 | Dresser Ind Inc | Control method of nonlinearity of change device |
Also Published As
Publication number | Publication date |
---|---|
JPS6140054B2 (en) | 1986-09-06 |
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