JPS6412097B2 - - Google Patents
Info
- Publication number
- JPS6412097B2 JPS6412097B2 JP57215232A JP21523282A JPS6412097B2 JP S6412097 B2 JPS6412097 B2 JP S6412097B2 JP 57215232 A JP57215232 A JP 57215232A JP 21523282 A JP21523282 A JP 21523282A JP S6412097 B2 JPS6412097 B2 JP S6412097B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring layer
- polycrystalline silicon
- film
- fuse
- silicon wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
- H10W20/031—Manufacture or treatment of conductive parts of the interconnections
- H10W20/067—Manufacture or treatment of conductive parts of the interconnections by modifying the pattern of conductive parts
- H10W20/068—Manufacture or treatment of conductive parts of the interconnections by modifying the pattern of conductive parts by using a laser, e.g. laser cutting or laser direct writing
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57215232A JPS59104141A (ja) | 1982-12-07 | 1982-12-07 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57215232A JPS59104141A (ja) | 1982-12-07 | 1982-12-07 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59104141A JPS59104141A (ja) | 1984-06-15 |
| JPS6412097B2 true JPS6412097B2 (cg-RX-API-DMAC7.html) | 1989-02-28 |
Family
ID=16668894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57215232A Granted JPS59104141A (ja) | 1982-12-07 | 1982-12-07 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59104141A (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0821623B2 (ja) * | 1985-09-20 | 1996-03-04 | 株式会社日立製作所 | レ−ザ処理方法 |
| JPH06302603A (ja) * | 1993-03-26 | 1994-10-28 | Hitachi Ltd | Ｉｃ素子 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5917265A (ja) * | 1982-07-20 | 1984-01-28 | Toshiba Corp | 半導体装置の製造方法およびその製造装置 |
-
1982
- 1982-12-07 JP JP57215232A patent/JPS59104141A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59104141A (ja) | 1984-06-15 |