JPS6395235U - - Google Patents
Info
- Publication number
- JPS6395235U JPS6395235U JP19060386U JP19060386U JPS6395235U JP S6395235 U JPS6395235 U JP S6395235U JP 19060386 U JP19060386 U JP 19060386U JP 19060386 U JP19060386 U JP 19060386U JP S6395235 U JPS6395235 U JP S6395235U
- Authority
- JP
- Japan
- Prior art keywords
- pattern detection
- data processing
- search
- pattern
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 5
- 230000002950 deficient Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000012958 reprocessing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19060386U JPS6395235U (enrdf_load_stackoverflow) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19060386U JPS6395235U (enrdf_load_stackoverflow) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395235U true JPS6395235U (enrdf_load_stackoverflow) | 1988-06-20 |
Family
ID=31143976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19060386U Pending JPS6395235U (enrdf_load_stackoverflow) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395235U (enrdf_load_stackoverflow) |
-
1986
- 1986-12-12 JP JP19060386U patent/JPS6395235U/ja active Pending
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