JPS6394651A - 基板移載装置 - Google Patents

基板移載装置

Info

Publication number
JPS6394651A
JPS6394651A JP61239891A JP23989186A JPS6394651A JP S6394651 A JPS6394651 A JP S6394651A JP 61239891 A JP61239891 A JP 61239891A JP 23989186 A JP23989186 A JP 23989186A JP S6394651 A JPS6394651 A JP S6394651A
Authority
JP
Japan
Prior art keywords
substrate
section
transfer tool
unprocessed
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61239891A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234172B2 (enExample
Inventor
Masami Otani
正美 大谷
Masahiro Himoto
樋本　政弘
Masami Nishida
雅美 西田
Akio Tsuchiya
昭夫 土屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP61239891A priority Critical patent/JPS6394651A/ja
Priority to US07/106,584 priority patent/US4846623A/en
Publication of JPS6394651A publication Critical patent/JPS6394651A/ja
Publication of JPH0234172B2 publication Critical patent/JPH0234172B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61239891A 1986-10-08 1986-10-08 基板移載装置 Granted JPS6394651A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61239891A JPS6394651A (ja) 1986-10-08 1986-10-08 基板移載装置
US07/106,584 US4846623A (en) 1986-10-08 1987-10-08 Wafer transferring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61239891A JPS6394651A (ja) 1986-10-08 1986-10-08 基板移載装置

Publications (2)

Publication Number Publication Date
JPS6394651A true JPS6394651A (ja) 1988-04-25
JPH0234172B2 JPH0234172B2 (enExample) 1990-08-01

Family

ID=17051401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61239891A Granted JPS6394651A (ja) 1986-10-08 1986-10-08 基板移載装置

Country Status (1)

Country Link
JP (1) JPS6394651A (enExample)

Also Published As

Publication number Publication date
JPH0234172B2 (enExample) 1990-08-01

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