JPS6394622A - 書き込みレーザー光線の位置決めをし同期化するための装置及び方法 - Google Patents

書き込みレーザー光線の位置決めをし同期化するための装置及び方法

Info

Publication number
JPS6394622A
JPS6394622A JP62236373A JP23637387A JPS6394622A JP S6394622 A JPS6394622 A JP S6394622A JP 62236373 A JP62236373 A JP 62236373A JP 23637387 A JP23637387 A JP 23637387A JP S6394622 A JPS6394622 A JP S6394622A
Authority
JP
Japan
Prior art keywords
laser beam
chip
writing
scanning laser
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62236373A
Other languages
English (en)
Japanese (ja)
Inventor
マインラート・ケムプテル
エルコ・デーリング
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RASAREI HOLDING AG
Original Assignee
RASAREI HOLDING AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RASAREI HOLDING AG filed Critical RASAREI HOLDING AG
Publication of JPS6394622A publication Critical patent/JPS6394622A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P34/00—
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/01—Details
    • G06K7/015—Aligning or centering of the sensing device with respect to the record carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • H10W46/00—

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Mechanical Engineering (AREA)
  • Artificial Intelligence (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Printer (AREA)
  • Laser Beam Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62236373A 1986-09-22 1987-09-22 書き込みレーザー光線の位置決めをし同期化するための装置及び方法 Pending JPS6394622A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH3781/86-6 1986-09-22
CH3781/86A CH670592A5 (enExample) 1986-09-22 1986-09-22

Publications (1)

Publication Number Publication Date
JPS6394622A true JPS6394622A (ja) 1988-04-25

Family

ID=4263345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62236373A Pending JPS6394622A (ja) 1986-09-22 1987-09-22 書き込みレーザー光線の位置決めをし同期化するための装置及び方法

Country Status (10)

Country Link
US (1) US4809014A (enExample)
EP (1) EP0262088B1 (enExample)
JP (1) JPS6394622A (enExample)
KR (1) KR880004559A (enExample)
AT (1) ATE64238T1 (enExample)
CA (1) CA1278392C (enExample)
CH (1) CH670592A5 (enExample)
DE (1) DE3770559D1 (enExample)
IL (1) IL83969A (enExample)
ZA (1) ZA876229B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4927226A (en) * 1989-03-27 1990-05-22 General Electric Company Multiplexer for high power CW lasers
JP2004200221A (ja) * 2002-12-16 2004-07-15 Toray Eng Co Ltd レーザマーキング方法及び装置
US20050087520A1 (en) * 2003-10-28 2005-04-28 Lixiao Wang Method and apparatus for selective ablation of coatings from medical devices
US7297972B2 (en) * 2005-08-26 2007-11-20 Electro Scientific Industries, Inc. Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target
US7315038B2 (en) * 2005-08-26 2008-01-01 Electro Scientific Industries, Inc. Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target
BR112012019544A2 (pt) * 2010-02-04 2018-03-27 Echelon Laser Systems Lp metodo e sistema de corte com laser
JP2020528147A (ja) * 2017-07-27 2020-09-17 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ 検出機能を実現するための装置およびこのような装置を作動する方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4134066A (en) * 1977-03-24 1979-01-09 International Business Machines Corporation Wafer indexing system using a grid pattern and coding and orientation marks in each grid cell
DE3123031A1 (de) * 1981-06-10 1983-01-05 Siemens AG, 1000 Berlin und 8000 München Verfahren zur kennzeichnung von halbleiterchips und kennzeichenbarer halbleiterchip
US4695698A (en) * 1984-07-10 1987-09-22 Larassay Holding Ag Method of, and apparatus for, generating a predetermined pattern using laser radiation
DE3427611A1 (de) * 1984-07-26 1988-06-09 Bille Josef Laserstrahl-lithograph

Also Published As

Publication number Publication date
CH670592A5 (enExample) 1989-06-30
KR880004559A (ko) 1988-06-04
US4809014A (en) 1989-02-28
DE3770559D1 (de) 1991-07-11
ATE64238T1 (de) 1991-06-15
EP0262088B1 (de) 1991-06-05
ZA876229B (en) 1988-03-01
IL83969A (en) 1991-06-30
IL83969A0 (en) 1988-02-29
EP0262088A1 (de) 1988-03-30
CA1278392C (en) 1990-12-27

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