JPS6391515A - 光電測角装置 - Google Patents

光電測角装置

Info

Publication number
JPS6391515A
JPS6391515A JP62245939A JP24593987A JPS6391515A JP S6391515 A JPS6391515 A JP S6391515A JP 62245939 A JP62245939 A JP 62245939A JP 24593987 A JP24593987 A JP 24593987A JP S6391515 A JPS6391515 A JP S6391515A
Authority
JP
Japan
Prior art keywords
angle
measuring device
scale
angle measuring
upb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62245939A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0464567B2 (enExample
Inventor
アルフオンス・シユピース
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JPS6391515A publication Critical patent/JPS6391515A/ja
Publication of JPH0464567B2 publication Critical patent/JPH0464567B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP62245939A 1986-10-02 1987-10-01 光電測角装置 Granted JPS6391515A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3633574.6 1986-10-02
DE19863633574 DE3633574A1 (de) 1986-10-02 1986-10-02 Lichtelektrische winkelmesseinrichtung

Publications (2)

Publication Number Publication Date
JPS6391515A true JPS6391515A (ja) 1988-04-22
JPH0464567B2 JPH0464567B2 (enExample) 1992-10-15

Family

ID=6310911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62245939A Granted JPS6391515A (ja) 1986-10-02 1987-10-01 光電測角装置

Country Status (4)

Country Link
US (1) US4792678A (enExample)
EP (1) EP0262349B1 (enExample)
JP (1) JPS6391515A (enExample)
DE (2) DE3633574A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231111A (ja) * 1988-07-19 1990-02-01 Canon Inc ロータリーエンコーダ
JPH032624A (ja) * 1988-10-28 1991-01-09 Dr Johannes Heidenhain Gmbh 測角装置
JPH04225117A (ja) * 1990-04-11 1992-08-14 Dr Johannes Heidenhain Gmbh 集積光学センサ装置
JP2019174437A (ja) * 2017-12-29 2019-10-10 株式会社ミツトヨ 変位信号を与える耐汚染性及び耐欠陥性を有する光学式ロータリーエンコーダ構造

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3706277C2 (de) * 1986-02-28 1995-04-27 Canon Kk Drehungsmeßgeber
US4819051A (en) * 1987-06-29 1989-04-04 Honeywell Inc. Compensated rotary position encoder
DE3807011C1 (enExample) * 1988-03-04 1989-04-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
CH680240A5 (enExample) * 1988-06-30 1992-07-15 Politechnika Warszawska
DE3822007A1 (de) * 1988-06-30 1990-01-04 Bodenseewerk Geraetetech Digitaler lagesignalgeber
JP2586120B2 (ja) * 1988-09-22 1997-02-26 キヤノン株式会社 エンコーダー
JP2586122B2 (ja) * 1988-11-18 1997-02-26 キヤノン株式会社 ロータリーエンコーダ
DE3901534C1 (enExample) * 1989-01-20 1990-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE3905730C2 (de) * 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
EP0397202B1 (en) * 1989-05-12 1994-08-03 Canon Kabushiki Kaisha Encoder
DE58904652D1 (de) * 1989-09-27 1993-07-15 Heidenhain Gmbh Dr Johannes Winkelmesseinrichtung.
DE58904369D1 (de) * 1989-11-02 1993-06-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung.
GB2239088B (en) * 1989-11-24 1994-05-25 Ricoh Kk Optical movement measuring method and apparatus
DE69022571T2 (de) * 1989-12-26 1996-03-28 Canon Kk Rotations-Detektorapparat.
US5323001A (en) * 1989-12-26 1994-06-21 Canon Kabushiki Kaisha Rotary encoder with scale member and interference of zero and first order diffraction beam
US5079418A (en) * 1990-02-20 1992-01-07 Dr. Johannes Heidenhain Gmbh Position measuring apparatus with reflection
DE4006365A1 (de) * 1990-03-01 1991-10-17 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE9007584U1 (de) * 1990-03-13 1992-11-19 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Positionsmeßeinrichtung
DE9007559U1 (enExample) * 1990-03-13 1992-09-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut
DE4013566A1 (de) * 1990-04-27 1991-11-07 Heidenhain Gmbh Dr Johannes Winkelmesseinrichtung
US5138564A (en) * 1990-07-31 1992-08-11 Xerox Corporation Automatic encoder calibration
JPH05256666A (ja) * 1992-03-13 1993-10-05 Canon Inc ロータリーエンコーダー
JP3116535B2 (ja) * 1992-03-13 2000-12-11 キヤノン株式会社 ロータリーエンコーダー及びエンコーダー
JP3254737B2 (ja) * 1992-06-17 2002-02-12 キヤノン株式会社 エンコーダー
JP3478567B2 (ja) * 1992-09-25 2003-12-15 キヤノン株式会社 回転情報検出装置
DE4420276C2 (de) * 1993-06-10 2001-04-19 Matsushita Electric Industrial Co Ltd Apparat zur Versatzmessung von bewegten Körpern
KR0141445B1 (ko) * 1993-06-10 1998-07-01 모리시타 요이찌 변이의 측정방법 및 측정장치
DE4337005C2 (de) * 1993-10-29 2000-11-02 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung
JPH08313233A (ja) * 1995-05-23 1996-11-29 Fuji Photo Optical Co Ltd 光センサおよびこれを用いた光学装置
JP3977126B2 (ja) * 2002-04-12 2007-09-19 キヤノン株式会社 変位情報検出装置
EP2963394B1 (de) 2014-07-01 2016-06-08 SICK STEGMANN GmbH Vorrichtung und Verfahren zur diffraktiven Messung eines Drehwinkels
DE102015204165A1 (de) 2015-03-09 2016-09-15 Dr. Johannes Heidenhain Gmbh Optische Winkelmesseinrichtung

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756723A (en) * 1970-01-27 1973-09-04 Leitz Ernst Gmbh Method of measuring the displacement of an object and arrangement therefor
JPS50104037A (enExample) * 1974-01-12 1975-08-16
JPS5826002A (ja) * 1981-07-31 1983-02-16 Toshiba Corp スチ−ムリホ−ミング法及びスチ−ムリホ−ミング用反応管
JPS5889810U (ja) * 1981-12-11 1983-06-17 横河電機株式会社 光学式スケ−ル読取装置
JPS6165115A (ja) * 1984-09-05 1986-04-03 Canon Inc ロ−タリ−エンコ−ダ−
JPS6381212A (ja) * 1986-09-25 1988-04-12 Canon Inc ロ−タリ−エンコ−ダ−

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6813749A (enExample) * 1968-09-26 1970-04-01
NL6900491A (enExample) * 1969-01-11 1970-07-14
US3628026A (en) * 1969-09-05 1971-12-14 Dynamics Res Corp Linear encoder immune to scale bending error
SE355667B (enExample) * 1971-08-23 1973-04-30 Aga Ab
DE2431551C2 (de) * 1974-07-01 1981-09-17 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Anordnung zur Messung von Bewegungen und Geschwindigkeiten
DD128692B1 (de) * 1976-12-13 1983-05-25 Wieland Feist Anordnung zur winkelmessung
FR2412822A1 (fr) * 1977-12-08 1979-07-20 Anvar Procede et dispositif de mesure du deplacement d'un objet
US4629886A (en) * 1983-03-23 1986-12-16 Yokogawa Hokushin Electric Corporation High resolution digital diffraction grating scale encoder

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756723A (en) * 1970-01-27 1973-09-04 Leitz Ernst Gmbh Method of measuring the displacement of an object and arrangement therefor
JPS50104037A (enExample) * 1974-01-12 1975-08-16
JPS5826002A (ja) * 1981-07-31 1983-02-16 Toshiba Corp スチ−ムリホ−ミング法及びスチ−ムリホ−ミング用反応管
JPS5889810U (ja) * 1981-12-11 1983-06-17 横河電機株式会社 光学式スケ−ル読取装置
JPS6165115A (ja) * 1984-09-05 1986-04-03 Canon Inc ロ−タリ−エンコ−ダ−
JPS6381212A (ja) * 1986-09-25 1988-04-12 Canon Inc ロ−タリ−エンコ−ダ−

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231111A (ja) * 1988-07-19 1990-02-01 Canon Inc ロータリーエンコーダ
JPH032624A (ja) * 1988-10-28 1991-01-09 Dr Johannes Heidenhain Gmbh 測角装置
JPH04225117A (ja) * 1990-04-11 1992-08-14 Dr Johannes Heidenhain Gmbh 集積光学センサ装置
JP2019174437A (ja) * 2017-12-29 2019-10-10 株式会社ミツトヨ 変位信号を与える耐汚染性及び耐欠陥性を有する光学式ロータリーエンコーダ構造

Also Published As

Publication number Publication date
EP0262349A3 (en) 1989-06-21
EP0262349B1 (de) 1992-02-19
DE3633574C2 (enExample) 1989-05-11
JPH0464567B2 (enExample) 1992-10-15
DE3633574A1 (de) 1988-04-14
EP0262349A2 (de) 1988-04-06
US4792678A (en) 1988-12-20
DE3776742D1 (de) 1992-03-26

Similar Documents

Publication Publication Date Title
JPS6391515A (ja) 光電測角装置
US4868385A (en) Rotating state detection apparatus using a plurality of light beams
JP2586120B2 (ja) エンコーダー
US4979826A (en) Displacement measuring apparatus
US5026985A (en) Method and apparatus for detecting a reference position of a rotating scale with two sensors
GB2187282A (en) Rotary encoder
US5000542A (en) Optical type encoder
US4975570A (en) Rotary encoder using multiple diffracted beams having co-incident paths
US5017777A (en) Diffracted beam encoder
JPH046884B2 (enExample)
JP3038860B2 (ja) エンコーダ
JPS62200225A (ja) ロ−タリ−エンコ−ダ−
JPH0462003B2 (enExample)
JPH07117426B2 (ja) 光学式エンコーダー
JPH0462004B2 (enExample)
JPH07119626B2 (ja) ロータリーエンコーダー
JPH0781883B2 (ja) エンコーダー
JPH045142B2 (enExample)
JPH02298804A (ja) 干渉計測装置
JP2003035570A (ja) 回折干渉式リニアスケール
JPH0285717A (ja) エンコーダ
JP2683098B2 (ja) エンコーダー
JP2629606B2 (ja) エンコーダー
JPH07119623B2 (ja) 変位測定装置
JPH0285716A (ja) ロータリーエンコーダー