JPS6387505U - - Google Patents

Info

Publication number
JPS6387505U
JPS6387505U JP18263286U JP18263286U JPS6387505U JP S6387505 U JPS6387505 U JP S6387505U JP 18263286 U JP18263286 U JP 18263286U JP 18263286 U JP18263286 U JP 18263286U JP S6387505 U JPS6387505 U JP S6387505U
Authority
JP
Japan
Prior art keywords
slit
laser
reflected light
inspected
passed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18263286U
Other languages
English (en)
Other versions
JPH0542326Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18263286U priority Critical patent/JPH0542326Y2/ja
Publication of JPS6387505U publication Critical patent/JPS6387505U/ja
Application granted granted Critical
Publication of JPH0542326Y2 publication Critical patent/JPH0542326Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Description

【図面の簡単な説明】
第1図はこの考案の一実施例のレーザ外観検査
装置の概念図、第2図はこの考案のスリツトを示
す図、第3図は従来のスリツトを示す図、第4図
はレーザビームスポツトを示す図、第5図はレー
ザビームの光強度分布を示す図である。 11……He―Neレーザ、12……コリメー
タレンズ、13……ボール、14……集光レンズ
、15……スリツト板、16……光電子増倍管、
17……スリツト。

Claims (1)

  1. 【実用新案登録請求の範囲】 被検査物にレーザ光を照射するレーザ光源と、
    上記被検査物からの反射光の一部分を通すスリツ
    トと、上記スリツトを通つた反射光を光電変換す
    る光電変換装置を備えたレーザ外観検査装置にお
    いて、 上記スリツトは反射光スポツトの同一光強度部
    を通す円弧状をしていることを特徴とするレーザ
    外観検査装置。
JP18263286U 1986-11-26 1986-11-26 Expired - Lifetime JPH0542326Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18263286U JPH0542326Y2 (ja) 1986-11-26 1986-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18263286U JPH0542326Y2 (ja) 1986-11-26 1986-11-26

Publications (2)

Publication Number Publication Date
JPS6387505U true JPS6387505U (ja) 1988-06-07
JPH0542326Y2 JPH0542326Y2 (ja) 1993-10-26

Family

ID=31128611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18263286U Expired - Lifetime JPH0542326Y2 (ja) 1986-11-26 1986-11-26

Country Status (1)

Country Link
JP (1) JPH0542326Y2 (ja)

Also Published As

Publication number Publication date
JPH0542326Y2 (ja) 1993-10-26

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