JPH02118252U - - Google Patents
Info
- Publication number
- JPH02118252U JPH02118252U JP2645189U JP2645189U JPH02118252U JP H02118252 U JPH02118252 U JP H02118252U JP 2645189 U JP2645189 U JP 2645189U JP 2645189 U JP2645189 U JP 2645189U JP H02118252 U JPH02118252 U JP H02118252U
- Authority
- JP
- Japan
- Prior art keywords
- optical board
- output signal
- inspection device
- type
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims 2
- 230000003321 amplification Effects 0.000 claims 1
- 230000007547 defect Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
第１図は本考案の一実施例を示す模式図である
。 １……光学基板、２……光ヘツド、７……光路
補正板、８…補正増幅器。
。 １……光学基板、２……光ヘツド、７……光路
補正板、８…補正増幅器。
Claims (1)
- 【実用新案登録請求の範囲】 光学基板にレーザ光を照射して反射光の強度に
比例した出力信号を用い前記光学基板の欠陥を検
査する光学基板検査装置において、 (A) 前記光学基板の種類に応じて、光ヘツドと
前記光学基板との間に光路補正板を挿入する光路
補正機構、 (B) 前記光学基板の種類に応じて、前記出力信
号の増幅度を補正する補正増幅器、 とを含むことを特徴とする光学基板検査装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2645189U JPH02118252U (ja) | 1989-03-07 | 1989-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2645189U JPH02118252U (ja) | 1989-03-07 | 1989-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118252U true JPH02118252U (ja) | 1990-09-21 |
Family
ID=31248088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2645189U Pending JPH02118252U (ja) | 1989-03-07 | 1989-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118252U (ja) |
-
1989
- 1989-03-07 JP JP2645189U patent/JPH02118252U/ja active Pending
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