JPS62180758U - - Google Patents

Info

Publication number
JPS62180758U
JPS62180758U JP6824386U JP6824386U JPS62180758U JP S62180758 U JPS62180758 U JP S62180758U JP 6824386 U JP6824386 U JP 6824386U JP 6824386 U JP6824386 U JP 6824386U JP S62180758 U JPS62180758 U JP S62180758U
Authority
JP
Japan
Prior art keywords
light
light receiver
optical axis
inspection machine
transparent substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6824386U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6824386U priority Critical patent/JPS62180758U/ja
Publication of JPS62180758U publication Critical patent/JPS62180758U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

【図面の簡単な説明】
第１図Ａ，Ｂは本考案の一実施例で、Ａはその
上面図であり、Ｂはその側面図である。第２図は
本考案の他の実施例を示す見取り図である。 １…レーザ管、３…フリメートレンズ、４…ガ
ラス盤、５…デフエクト、７…対物レンズ、８…
受光素子。

Claims (1)

    【実用新案登録請求の範囲】
  1. 透明基板表面にレーザ光を照射し、デフエクト
    による散乱光を受光器により検出する表面検査機
    において、上記レーザ光を上記透明基板表面にほ
    ぼ水平にし、受光器を上記レーザ光にほぼ対向す
    る位置に配し、上記受光器の光軸を上記レーザ光
    の光軸からわずかにずらしたことを特徴とする基
    板表面検査機。
JP6824386U 1986-05-08 1986-05-08 Pending JPS62180758U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6824386U JPS62180758U (ja) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6824386U JPS62180758U (ja) 1986-05-08 1986-05-08

Publications (1)

Publication Number Publication Date
JPS62180758U true JPS62180758U (ja) 1987-11-17

Family

ID=30907882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6824386U Pending JPS62180758U (ja) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPS62180758U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102439A (ja) * 1988-10-12 1990-04-16 Nissan Motor Co Ltd 板表面の付着物等評価装置
JP2005274173A (ja) * 2004-03-23 2005-10-06 Japan Science & Technology Agency ウエハー基板、液晶ディスプレイ用透明ガラス等の被検査物の表面上の異物・表面検査方法およびその装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153693A (ja) * 1974-05-30 1975-12-10
JPS5780546A (en) * 1980-11-07 1982-05-20 Nippon Kogaku Kk <Nikon> Detecting device for foreign substance

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153693A (ja) * 1974-05-30 1975-12-10
JPS5780546A (en) * 1980-11-07 1982-05-20 Nippon Kogaku Kk <Nikon> Detecting device for foreign substance

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102439A (ja) * 1988-10-12 1990-04-16 Nissan Motor Co Ltd 板表面の付着物等評価装置
JP2005274173A (ja) * 2004-03-23 2005-10-06 Japan Science & Technology Agency ウエハー基板、液晶ディスプレイ用透明ガラス等の被検査物の表面上の異物・表面検査方法およびその装置

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