JPS6365232U - - Google Patents

Info

Publication number
JPS6365232U
JPS6365232U JP15977586U JP15977586U JPS6365232U JP S6365232 U JPS6365232 U JP S6365232U JP 15977586 U JP15977586 U JP 15977586U JP 15977586 U JP15977586 U JP 15977586U JP S6365232 U JPS6365232 U JP S6365232U
Authority
JP
Japan
Prior art keywords
light
half mirror
mask
irradiates
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15977586U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15977586U priority Critical patent/JPS6365232U/ja
Publication of JPS6365232U publication Critical patent/JPS6365232U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
図はこの考案の一実施例の半導体検査装置の概
略構成図である。 １…光源、４…ハーフミラー、５…半導体ウエ
ハース、８…マスク、９…光検出器。

Claims (1)

  1. 【実用新案登録請求の範囲】 半導体ウエハース表面を検査するための照明光
    を発する光源と、 この光源からの光源を透過するハーフミラーと
    、 このハーフミラーの透過光が照射され、その反
    射光を再びハーフミラーに照射する半導体ウエハ
    ースと 前記ハーフミラーでの反射光が照射されるマス
    クと、 このマスクの透過光を検出する光検出器とを具
    備してなる半導体検査装置。
JP15977586U 1986-10-17 1986-10-17 Pending JPS6365232U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15977586U JPS6365232U (ja) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15977586U JPS6365232U (ja) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365232U true JPS6365232U (ja) 1988-04-30

Family

ID=31084525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15977586U Pending JPS6365232U (ja) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365232U (ja)

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