JPS6382389A - 試料微動機構 - Google Patents

試料微動機構

Info

Publication number
JPS6382389A
JPS6382389A JP61226285A JP22628586A JPS6382389A JP S6382389 A JPS6382389 A JP S6382389A JP 61226285 A JP61226285 A JP 61226285A JP 22628586 A JP22628586 A JP 22628586A JP S6382389 A JPS6382389 A JP S6382389A
Authority
JP
Japan
Prior art keywords
sample
guide body
piezoelectric elements
piezoelectric element
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61226285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04556B2 (enrdf_load_stackoverflow
Inventor
宮崎　安通
古賀　康憲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Priority to JP61226285A priority Critical patent/JPS6382389A/ja
Priority to US07/101,233 priority patent/US4798989A/en
Priority to DE19873732426 priority patent/DE3732426A1/de
Priority to GB8722573A priority patent/GB2197752B/en
Publication of JPS6382389A publication Critical patent/JPS6382389A/ja
Priority to GB9014054A priority patent/GB2232294B/en
Publication of JPH04556B2 publication Critical patent/JPH04556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP61226285A 1986-09-26 1986-09-26 試料微動機構 Granted JPS6382389A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP61226285A JPS6382389A (ja) 1986-09-26 1986-09-26 試料微動機構
US07/101,233 US4798989A (en) 1986-09-26 1987-09-24 Scanning tunneling microscope installed in electron microscope
DE19873732426 DE3732426A1 (de) 1986-09-26 1987-09-25 In ein elektronenmikroskop eingebautes rastertunnelmikroskop
GB8722573A GB2197752B (en) 1986-09-26 1987-09-25 Prove moving mechanism
GB9014054A GB2232294B (en) 1986-09-26 1990-06-25 Scanning electron microscope.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61226285A JPS6382389A (ja) 1986-09-26 1986-09-26 試料微動機構

Publications (2)

Publication Number Publication Date
JPS6382389A true JPS6382389A (ja) 1988-04-13
JPH04556B2 JPH04556B2 (enrdf_load_stackoverflow) 1992-01-07

Family

ID=16842816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61226285A Granted JPS6382389A (ja) 1986-09-26 1986-09-26 試料微動機構

Country Status (1)

Country Link
JP (1) JPS6382389A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構

Also Published As

Publication number Publication date
JPH04556B2 (enrdf_load_stackoverflow) 1992-01-07

Similar Documents

Publication Publication Date Title
EP0331148B1 (en) Microscope apparatus
JP2815196B2 (ja) 微細表面形状計測装置
GB2197752A (en) Scanning tunneling microscope installed in electron microscope
JPH0212381B2 (enrdf_load_stackoverflow)
EP0071666B1 (en) Electric travelling support
JP2534442B2 (ja) 二重たわみ部材キャリッジ及び二重たわみ部材組立体
US20040069944A1 (en) Balanced momentum probe holder
JPH05157554A (ja) 光学顕微鏡組込型プローブ顕微鏡
Xu et al. Microelectromechanical scanning tunneling microscope
JPS6382389A (ja) 試料微動機構
KR920005446B1 (ko) 현미경 장치
EP1436636B1 (en) Method and apparatus for sub-micron imaging and probing on probe station
JPH034102A (ja) 走査型トンネル顕微鏡
JPH0544723Y2 (enrdf_load_stackoverflow)
JP2642636B2 (ja) プローブユニットの駆動機構およびその駆動方法
JPS63153405A (ja) 走査型トンネル顕微鏡
JPH0625642B2 (ja) 走査型トンネル顕微鏡装置
JPH0529243B2 (enrdf_load_stackoverflow)
JPH06288760A (ja) 微動ステージ装置
JP2691460B2 (ja) トンネル電流検出装置
JPH0458102A (ja) 光学式顕微鏡付走査型トンネル顕微鏡とその探針の位置合わせ方法
JPH02297003A (ja) 検出部位置決機構、圧電素子微動機構およびこれらを用いた走査型トンネル顕微鏡
JPH06258070A (ja) 走査型プローブ顕微鏡
JPH0293304A (ja) 顕微鏡装置
JPS63141380A (ja) 圧電素子体微動機構