JPH0544723Y2 - - Google Patents
Info
- Publication number
- JPH0544723Y2 JPH0544723Y2 JP1987009885U JP988587U JPH0544723Y2 JP H0544723 Y2 JPH0544723 Y2 JP H0544723Y2 JP 1987009885 U JP1987009885 U JP 1987009885U JP 988587 U JP988587 U JP 988587U JP H0544723 Y2 JPH0544723 Y2 JP H0544723Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezo element
- probe
- driving
- piezo
- directions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 61
- 239000000126 substance Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000005489 elastic deformation Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 230000005428 wave function Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987009885U JPH0544723Y2 (enrdf_load_stackoverflow) | 1987-01-28 | 1987-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987009885U JPH0544723Y2 (enrdf_load_stackoverflow) | 1987-01-28 | 1987-01-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63120111U JPS63120111U (enrdf_load_stackoverflow) | 1988-08-03 |
| JPH0544723Y2 true JPH0544723Y2 (enrdf_load_stackoverflow) | 1993-11-15 |
Family
ID=30795624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987009885U Expired - Lifetime JPH0544723Y2 (enrdf_load_stackoverflow) | 1987-01-28 | 1987-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544723Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-01-28 JP JP1987009885U patent/JPH0544723Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63120111U (enrdf_load_stackoverflow) | 1988-08-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0478666B1 (en) | Microfabricated microscope assembly | |
| US4798989A (en) | Scanning tunneling microscope installed in electron microscope | |
| JP3450349B2 (ja) | カンチレバー型プローブ | |
| US6861649B2 (en) | Balanced momentum probe holder | |
| JP2534442B2 (ja) | 二重たわみ部材キャリッジ及び二重たわみ部材組立体 | |
| DE69115724T2 (de) | Oberflächenmikroskop | |
| JPH0212381B2 (enrdf_load_stackoverflow) | ||
| Grube et al. | Stability, resolution, and tip–tip imaging by a dual-probe scanning tunneling microscope | |
| US6194813B1 (en) | Extended-range xyz linear piezo-mechanical scanner for scanning-probe and surface force applications | |
| JPH0544723Y2 (enrdf_load_stackoverflow) | ||
| KR20220052365A (ko) | 원자 나노 포지셔닝 장치 | |
| Olfat et al. | A single-chip scanning probe microscope array | |
| JP3060527B2 (ja) | 位置決め装置 | |
| KR100269547B1 (ko) | 미세 위치 결정 장치용 틸팅 포지셔너 | |
| JPH0458102A (ja) | 光学式顕微鏡付走査型トンネル顕微鏡とその探針の位置合わせ方法 | |
| JPH04344406A (ja) | 走査型トンネル顕微鏡 | |
| JP2565392B2 (ja) | 走査型トンネル顕微鏡の測定方法 | |
| JPH01187402A (ja) | 走査トンネル顕微鏡 | |
| JPH0529243B2 (enrdf_load_stackoverflow) | ||
| De Jong et al. | A planar 3 DOF sample manipulator for nano-scale characterization | |
| JPH04556B2 (enrdf_load_stackoverflow) | ||
| RU2181212C2 (ru) | Способ перемещения зонда сканирующего микроскопа-нанолитографа в поле грубого x-y позиционера | |
| JPH05946B2 (enrdf_load_stackoverflow) | ||
| JPH0312504A (ja) | 走査型トンネル顕微鏡の制御方式 | |
| KR20190135844A (ko) | 가변온도 주사탐침 현미경 |