JPH04556B2 - - Google Patents

Info

Publication number
JPH04556B2
JPH04556B2 JP61226285A JP22628586A JPH04556B2 JP H04556 B2 JPH04556 B2 JP H04556B2 JP 61226285 A JP61226285 A JP 61226285A JP 22628586 A JP22628586 A JP 22628586A JP H04556 B2 JPH04556 B2 JP H04556B2
Authority
JP
Japan
Prior art keywords
piezoelectric elements
sample
guide body
upper clamp
piezoelectric element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61226285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6382389A (ja
Inventor
Yasumichi Myazaki
Yasunori Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MITSUTOYO KK
SHINGIJUTSU JIGYODAN
Original Assignee
MITSUTOYO KK
SHINGIJUTSU JIGYODAN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MITSUTOYO KK, SHINGIJUTSU JIGYODAN filed Critical MITSUTOYO KK
Priority to JP61226285A priority Critical patent/JPS6382389A/ja
Priority to US07/101,233 priority patent/US4798989A/en
Priority to DE19873732426 priority patent/DE3732426A1/de
Priority to GB8722573A priority patent/GB2197752B/en
Publication of JPS6382389A publication Critical patent/JPS6382389A/ja
Priority to GB9014054A priority patent/GB2232294B/en
Publication of JPH04556B2 publication Critical patent/JPH04556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP61226285A 1986-09-26 1986-09-26 試料微動機構 Granted JPS6382389A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP61226285A JPS6382389A (ja) 1986-09-26 1986-09-26 試料微動機構
US07/101,233 US4798989A (en) 1986-09-26 1987-09-24 Scanning tunneling microscope installed in electron microscope
DE19873732426 DE3732426A1 (de) 1986-09-26 1987-09-25 In ein elektronenmikroskop eingebautes rastertunnelmikroskop
GB8722573A GB2197752B (en) 1986-09-26 1987-09-25 Prove moving mechanism
GB9014054A GB2232294B (en) 1986-09-26 1990-06-25 Scanning electron microscope.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61226285A JPS6382389A (ja) 1986-09-26 1986-09-26 試料微動機構

Publications (2)

Publication Number Publication Date
JPS6382389A JPS6382389A (ja) 1988-04-13
JPH04556B2 true JPH04556B2 (enrdf_load_stackoverflow) 1992-01-07

Family

ID=16842816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61226285A Granted JPS6382389A (ja) 1986-09-26 1986-09-26 試料微動機構

Country Status (1)

Country Link
JP (1) JPS6382389A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構

Also Published As

Publication number Publication date
JPS6382389A (ja) 1988-04-13

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