JPH0529243B2 - - Google Patents
Info
- Publication number
- JPH0529243B2 JPH0529243B2 JP22628686A JP22628686A JPH0529243B2 JP H0529243 B2 JPH0529243 B2 JP H0529243B2 JP 22628686 A JP22628686 A JP 22628686A JP 22628686 A JP22628686 A JP 22628686A JP H0529243 B2 JPH0529243 B2 JP H0529243B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- piezoelectric element
- sample
- piezoelectric elements
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 137
- 230000007246 mechanism Effects 0.000 claims description 36
- 230000005641 tunneling Effects 0.000 description 25
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910001234 light alloy Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22628686A JPS6381745A (ja) | 1986-09-26 | 1986-09-26 | 走査型トンネル顕微鏡の探針走査機構 |
| US07/101,233 US4798989A (en) | 1986-09-26 | 1987-09-24 | Scanning tunneling microscope installed in electron microscope |
| DE19873732426 DE3732426A1 (de) | 1986-09-26 | 1987-09-25 | In ein elektronenmikroskop eingebautes rastertunnelmikroskop |
| GB8722573A GB2197752B (en) | 1986-09-26 | 1987-09-25 | Prove moving mechanism |
| GB9014054A GB2232294B (en) | 1986-09-26 | 1990-06-25 | Scanning electron microscope. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22628686A JPS6381745A (ja) | 1986-09-26 | 1986-09-26 | 走査型トンネル顕微鏡の探針走査機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381745A JPS6381745A (ja) | 1988-04-12 |
| JPH0529243B2 true JPH0529243B2 (enrdf_load_stackoverflow) | 1993-04-28 |
Family
ID=16842832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22628686A Granted JPS6381745A (ja) | 1986-09-26 | 1986-09-26 | 走査型トンネル顕微鏡の探針走査機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6381745A (enrdf_load_stackoverflow) |
-
1986
- 1986-09-26 JP JP22628686A patent/JPS6381745A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6381745A (ja) | 1988-04-12 |
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