JPS6380847U - - Google Patents

Info

Publication number
JPS6380847U
JPS6380847U JP17560786U JP17560786U JPS6380847U JP S6380847 U JPS6380847 U JP S6380847U JP 17560786 U JP17560786 U JP 17560786U JP 17560786 U JP17560786 U JP 17560786U JP S6380847 U JPS6380847 U JP S6380847U
Authority
JP
Japan
Prior art keywords
cassette
grooves
transfer device
wafer transfer
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17560786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17560786U priority Critical patent/JPS6380847U/ja
Publication of JPS6380847U publication Critical patent/JPS6380847U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP17560786U 1986-11-14 1986-11-14 Pending JPS6380847U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17560786U JPS6380847U (de) 1986-11-14 1986-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17560786U JPS6380847U (de) 1986-11-14 1986-11-14

Publications (1)

Publication Number Publication Date
JPS6380847U true JPS6380847U (de) 1988-05-27

Family

ID=31115090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17560786U Pending JPS6380847U (de) 1986-11-14 1986-11-14

Country Status (1)

Country Link
JP (1) JPS6380847U (de)

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