JPS63102236U - - Google Patents
Info
- Publication number
- JPS63102236U JPS63102236U JP19816186U JP19816186U JPS63102236U JP S63102236 U JPS63102236 U JP S63102236U JP 19816186 U JP19816186 U JP 19816186U JP 19816186 U JP19816186 U JP 19816186U JP S63102236 U JPS63102236 U JP S63102236U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped semiconductor
- accommodating part
- view
- supporting member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 16
- 235000012431 wafers Nutrition 0.000 description 9
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19816186U JPS63102236U (de) | 1986-12-23 | 1986-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19816186U JPS63102236U (de) | 1986-12-23 | 1986-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102236U true JPS63102236U (de) | 1988-07-02 |
Family
ID=31158598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19816186U Pending JPS63102236U (de) | 1986-12-23 | 1986-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102236U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02145240U (de) * | 1989-05-15 | 1990-12-10 | ||
| JPH0348439A (ja) * | 1989-07-17 | 1991-03-01 | Tokyo Electron Sagami Ltd | 熱処理装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860553A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
-
1986
- 1986-12-23 JP JP19816186U patent/JPS63102236U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860553A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02145240U (de) * | 1989-05-15 | 1990-12-10 | ||
| JPH0348439A (ja) * | 1989-07-17 | 1991-03-01 | Tokyo Electron Sagami Ltd | 熱処理装置 |