JPS63177047U - - Google Patents
Info
- Publication number
- JPS63177047U JPS63177047U JP6672087U JP6672087U JPS63177047U JP S63177047 U JPS63177047 U JP S63177047U JP 6672087 U JP6672087 U JP 6672087U JP 6672087 U JP6672087 U JP 6672087U JP S63177047 U JPS63177047 U JP S63177047U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer
- carrier
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6672087U JPS63177047U (de) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6672087U JPS63177047U (de) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177047U true JPS63177047U (de) | 1988-11-16 |
Family
ID=30904989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6672087U Pending JPS63177047U (de) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177047U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273643A (ja) * | 2006-03-30 | 2007-10-18 | Phyzchemix Corp | ウエハカセット及びウエハ収容方法 |
-
1987
- 1987-04-30 JP JP6672087U patent/JPS63177047U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273643A (ja) * | 2006-03-30 | 2007-10-18 | Phyzchemix Corp | ウエハカセット及びウエハ収容方法 |