JPS6171366U - - Google Patents
Info
- Publication number
- JPS6171366U JPS6171366U JP15668584U JP15668584U JPS6171366U JP S6171366 U JPS6171366 U JP S6171366U JP 15668584 U JP15668584 U JP 15668584U JP 15668584 U JP15668584 U JP 15668584U JP S6171366 U JPS6171366 U JP S6171366U
- Authority
- JP
- Japan
- Prior art keywords
- tweezers
- handling
- disc
- utility
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15668584U JPS6171366U (de) | 1984-10-17 | 1984-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15668584U JPS6171366U (de) | 1984-10-17 | 1984-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6171366U true JPS6171366U (de) | 1986-05-15 |
Family
ID=30714690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15668584U Pending JPS6171366U (de) | 1984-10-17 | 1984-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6171366U (de) |
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1984
- 1984-10-17 JP JP15668584U patent/JPS6171366U/ja active Pending