JPS6170937U - - Google Patents
Info
- Publication number
- JPS6170937U JPS6170937U JP15655384U JP15655384U JPS6170937U JP S6170937 U JPS6170937 U JP S6170937U JP 15655384 U JP15655384 U JP 15655384U JP 15655384 U JP15655384 U JP 15655384U JP S6170937 U JPS6170937 U JP S6170937U
- Authority
- JP
- Japan
- Prior art keywords
- storage
- semiconductor wafers
- storage container
- semiconductor
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Warehouses Or Storage Devices (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15655384U JPS6170937U (de) | 1984-10-17 | 1984-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15655384U JPS6170937U (de) | 1984-10-17 | 1984-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170937U true JPS6170937U (de) | 1986-05-15 |
Family
ID=30714558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15655384U Pending JPS6170937U (de) | 1984-10-17 | 1984-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170937U (de) |
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1984
- 1984-10-17 JP JP15655384U patent/JPS6170937U/ja active Pending