JPS6217136U - - Google Patents

Info

Publication number
JPS6217136U
JPS6217136U JP10998885U JP10998885U JPS6217136U JP S6217136 U JPS6217136 U JP S6217136U JP 10998885 U JP10998885 U JP 10998885U JP 10998885 U JP10998885 U JP 10998885U JP S6217136 U JPS6217136 U JP S6217136U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
storage jig
handle
wafer storage
storing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10998885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10998885U priority Critical patent/JPS6217136U/ja
Publication of JPS6217136U publication Critical patent/JPS6217136U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP10998885U 1985-07-17 1985-07-17 Pending JPS6217136U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10998885U JPS6217136U (de) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10998885U JPS6217136U (de) 1985-07-17 1985-07-17

Publications (1)

Publication Number Publication Date
JPS6217136U true JPS6217136U (de) 1987-02-02

Family

ID=30988601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10998885U Pending JPS6217136U (de) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPS6217136U (de)

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