JPS6173578U - - Google Patents
Info
- Publication number
- JPS6173578U JPS6173578U JP15628884U JP15628884U JPS6173578U JP S6173578 U JPS6173578 U JP S6173578U JP 15628884 U JP15628884 U JP 15628884U JP 15628884 U JP15628884 U JP 15628884U JP S6173578 U JPS6173578 U JP S6173578U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- handle
- wafers
- storing
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15628884U JPS6173578U (de) | 1984-10-15 | 1984-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15628884U JPS6173578U (de) | 1984-10-15 | 1984-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6173578U true JPS6173578U (de) | 1986-05-19 |
Family
ID=30714293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15628884U Pending JPS6173578U (de) | 1984-10-15 | 1984-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6173578U (de) |
-
1984
- 1984-10-15 JP JP15628884U patent/JPS6173578U/ja active Pending