JPS61164041U - - Google Patents
Info
- Publication number
- JPS61164041U JPS61164041U JP4056585U JP4056585U JPS61164041U JP S61164041 U JPS61164041 U JP S61164041U JP 4056585 U JP4056585 U JP 4056585U JP 4056585 U JP4056585 U JP 4056585U JP S61164041 U JPS61164041 U JP S61164041U
- Authority
- JP
- Japan
- Prior art keywords
- adhering
- dust
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000002265 prevention Effects 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4056585U JPS61164041U (de) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4056585U JPS61164041U (de) | 1985-03-20 | 1985-03-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61164041U true JPS61164041U (de) | 1986-10-11 |
Family
ID=30549571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4056585U Pending JPS61164041U (de) | 1985-03-20 | 1985-03-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61164041U (de) |
-
1985
- 1985-03-20 JP JP4056585U patent/JPS61164041U/ja active Pending