JPH01165623U - - Google Patents
Info
- Publication number
- JPH01165623U JPH01165623U JP6238188U JP6238188U JPH01165623U JP H01165623 U JPH01165623 U JP H01165623U JP 6238188 U JP6238188 U JP 6238188U JP 6238188 U JP6238188 U JP 6238188U JP H01165623 U JPH01165623 U JP H01165623U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- support parts
- utility
- thin plate
- plate shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6238188U JPH01165623U (de) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6238188U JPH01165623U (de) | 1988-05-11 | 1988-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165623U true JPH01165623U (de) | 1989-11-20 |
Family
ID=31287998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6238188U Pending JPH01165623U (de) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165623U (de) |
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1988
- 1988-05-11 JP JP6238188U patent/JPH01165623U/ja active Pending