JPS6379646U - - Google Patents

Info

Publication number
JPS6379646U
JPS6379646U JP13766986U JP13766986U JPS6379646U JP S6379646 U JPS6379646 U JP S6379646U JP 13766986 U JP13766986 U JP 13766986U JP 13766986 U JP13766986 U JP 13766986U JP S6379646 U JPS6379646 U JP S6379646U
Authority
JP
Japan
Prior art keywords
base plate
wafer boat
transfer device
top surface
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13766986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13766986U priority Critical patent/JPS6379646U/ja
Publication of JPS6379646U publication Critical patent/JPS6379646U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
JP13766986U 1985-12-04 1986-09-08 Pending JPS6379646U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13766986U JPS6379646U (de) 1985-12-04 1986-09-08

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18713785 1985-12-04
JP13766986U JPS6379646U (de) 1985-12-04 1986-09-08

Publications (1)

Publication Number Publication Date
JPS6379646U true JPS6379646U (de) 1988-05-26

Family

ID=33455147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13766986U Pending JPS6379646U (de) 1985-12-04 1986-09-08

Country Status (1)

Country Link
JP (1) JPS6379646U (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JPH05174776A (ja) * 1991-12-20 1993-07-13 Hitachi Ltd 半導体処理装置のロードロック室

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JPH05174776A (ja) * 1991-12-20 1993-07-13 Hitachi Ltd 半導体処理装置のロードロック室

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