JPH0367441U - - Google Patents
Info
- Publication number
- JPH0367441U JPH0367441U JP12930089U JP12930089U JPH0367441U JP H0367441 U JPH0367441 U JP H0367441U JP 12930089 U JP12930089 U JP 12930089U JP 12930089 U JP12930089 U JP 12930089U JP H0367441 U JPH0367441 U JP H0367441U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage grooves
- transfer device
- large number
- storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12930089U JPH0367441U (de) | 1989-11-07 | 1989-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12930089U JPH0367441U (de) | 1989-11-07 | 1989-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367441U true JPH0367441U (de) | 1991-07-01 |
Family
ID=31676939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12930089U Pending JPH0367441U (de) | 1989-11-07 | 1989-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367441U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014222700A (ja) * | 2013-05-13 | 2014-11-27 | 三菱電機株式会社 | ウエハの移し換え治具及びウエハの移し換え方法 |
-
1989
- 1989-11-07 JP JP12930089U patent/JPH0367441U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014222700A (ja) * | 2013-05-13 | 2014-11-27 | 三菱電機株式会社 | ウエハの移し換え治具及びウエハの移し換え方法 |