JPS63159838U - - Google Patents
Info
- Publication number
- JPS63159838U JPS63159838U JP5308887U JP5308887U JPS63159838U JP S63159838 U JPS63159838 U JP S63159838U JP 5308887 U JP5308887 U JP 5308887U JP 5308887 U JP5308887 U JP 5308887U JP S63159838 U JPS63159838 U JP S63159838U
- Authority
- JP
- Japan
- Prior art keywords
- platen
- wafer holding
- wafer
- base end
- holding surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5308887U JPS63159838U (de) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5308887U JPS63159838U (de) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159838U true JPS63159838U (de) | 1988-10-19 |
Family
ID=30878834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5308887U Pending JPS63159838U (de) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159838U (de) |
-
1987
- 1987-04-08 JP JP5308887U patent/JPS63159838U/ja active Pending