JPS6373934U - - Google Patents

Info

Publication number
JPS6373934U
JPS6373934U JP16876886U JP16876886U JPS6373934U JP S6373934 U JPS6373934 U JP S6373934U JP 16876886 U JP16876886 U JP 16876886U JP 16876886 U JP16876886 U JP 16876886U JP S6373934 U JPS6373934 U JP S6373934U
Authority
JP
Japan
Prior art keywords
semiconductor
tests
pellets
prober
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16876886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16876886U priority Critical patent/JPS6373934U/ja
Publication of JPS6373934U publication Critical patent/JPS6373934U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16876886U 1986-10-31 1986-10-31 Pending JPS6373934U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16876886U JPS6373934U (fr) 1986-10-31 1986-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16876886U JPS6373934U (fr) 1986-10-31 1986-10-31

Publications (1)

Publication Number Publication Date
JPS6373934U true JPS6373934U (fr) 1988-05-17

Family

ID=31101950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16876886U Pending JPS6373934U (fr) 1986-10-31 1986-10-31

Country Status (1)

Country Link
JP (1) JPS6373934U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049642A (ja) * 1983-08-29 1985-03-18 Nec Corp 半導体装置の検査装置
JPS60211900A (ja) * 1984-04-06 1985-10-24 日立電子エンジニアリング株式会社 Ｉｃハンドラの同期搬送機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6049642A (ja) * 1983-08-29 1985-03-18 Nec Corp 半導体装置の検査装置
JPS60211900A (ja) * 1984-04-06 1985-10-24 日立電子エンジニアリング株式会社 Ｉｃハンドラの同期搬送機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05123658A (ja) * 1991-10-17 1993-05-21 Japan Field Kk 被洗浄物の洗浄方法およびその装置

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