JPS6370940A - レジスト原盤の熱処理装置 - Google Patents
レジスト原盤の熱処理装置Info
- Publication number
- JPS6370940A JPS6370940A JP21477786A JP21477786A JPS6370940A JP S6370940 A JPS6370940 A JP S6370940A JP 21477786 A JP21477786 A JP 21477786A JP 21477786 A JP21477786 A JP 21477786A JP S6370940 A JPS6370940 A JP S6370940A
- Authority
- JP
- Japan
- Prior art keywords
- resist master
- resist
- baking
- temp
- master disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 18
- 230000005855 radiation Effects 0.000 claims abstract description 10
- 238000010521 absorption reaction Methods 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21477786A JPS6370940A (ja) | 1986-09-11 | 1986-09-11 | レジスト原盤の熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21477786A JPS6370940A (ja) | 1986-09-11 | 1986-09-11 | レジスト原盤の熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370940A true JPS6370940A (ja) | 1988-03-31 |
| JPH0557657B2 JPH0557657B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-24 |
Family
ID=16661361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21477786A Granted JPS6370940A (ja) | 1986-09-11 | 1986-09-11 | レジスト原盤の熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370940A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0268477A (ja) * | 1988-09-02 | 1990-03-07 | Pioneer Electron Corp | 光ディスク原盤の加熱乾燥装置 |
| JPH0268478A (ja) * | 1988-09-02 | 1990-03-07 | Pioneer Electron Corp | 光ディスク原盤の加熱乾燥装置 |
| EP0776005A3 (de) * | 1995-11-21 | 1999-04-07 | Balzers und Leybold Deutschland Holding Aktiengesellschaft | Vorrichtung zum Trocknen einer Lackschicht |
| WO1999059191A3 (de) * | 1998-05-12 | 2001-08-23 | Fraunhofer Ges Forschung | Verfahren und vorrichtung zur trocknung von photoresistschichten |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI632185B (zh) | 2013-08-07 | 2018-08-11 | 旭硝子股份有限公司 | Crosslinkable fluoroelastomer composition and crosslinked product thereof |
-
1986
- 1986-09-11 JP JP21477786A patent/JPS6370940A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0268477A (ja) * | 1988-09-02 | 1990-03-07 | Pioneer Electron Corp | 光ディスク原盤の加熱乾燥装置 |
| JPH0268478A (ja) * | 1988-09-02 | 1990-03-07 | Pioneer Electron Corp | 光ディスク原盤の加熱乾燥装置 |
| EP0776005A3 (de) * | 1995-11-21 | 1999-04-07 | Balzers und Leybold Deutschland Holding Aktiengesellschaft | Vorrichtung zum Trocknen einer Lackschicht |
| WO1999059191A3 (de) * | 1998-05-12 | 2001-08-23 | Fraunhofer Ges Forschung | Verfahren und vorrichtung zur trocknung von photoresistschichten |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0557657B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |