JPS636846Y2 - - Google Patents

Info

Publication number
JPS636846Y2
JPS636846Y2 JP10429482U JP10429482U JPS636846Y2 JP S636846 Y2 JPS636846 Y2 JP S636846Y2 JP 10429482 U JP10429482 U JP 10429482U JP 10429482 U JP10429482 U JP 10429482U JP S636846 Y2 JPS636846 Y2 JP S636846Y2
Authority
JP
Japan
Prior art keywords
needle
capillary
ion source
tip
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10429482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5910842U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10429482U priority Critical patent/JPS5910842U/ja
Publication of JPS5910842U publication Critical patent/JPS5910842U/ja
Application granted granted Critical
Publication of JPS636846Y2 publication Critical patent/JPS636846Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10429482U 1982-07-09 1982-07-09 金属イオン源 Granted JPS5910842U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10429482U JPS5910842U (ja) 1982-07-09 1982-07-09 金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10429482U JPS5910842U (ja) 1982-07-09 1982-07-09 金属イオン源

Publications (2)

Publication Number Publication Date
JPS5910842U JPS5910842U (ja) 1984-01-23
JPS636846Y2 true JPS636846Y2 (enExample) 1988-02-26

Family

ID=30244950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10429482U Granted JPS5910842U (ja) 1982-07-09 1982-07-09 金属イオン源

Country Status (1)

Country Link
JP (1) JPS5910842U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009245767A (ja) * 2008-03-31 2009-10-22 Kobe Steel Ltd イオン源、及びこのイオン源の製造方法

Also Published As

Publication number Publication date
JPS5910842U (ja) 1984-01-23

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