JPS5910842U - 金属イオン源 - Google Patents

金属イオン源

Info

Publication number
JPS5910842U
JPS5910842U JP10429482U JP10429482U JPS5910842U JP S5910842 U JPS5910842 U JP S5910842U JP 10429482 U JP10429482 U JP 10429482U JP 10429482 U JP10429482 U JP 10429482U JP S5910842 U JPS5910842 U JP S5910842U
Authority
JP
Japan
Prior art keywords
capillary
ion source
needle
metal ion
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10429482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS636846Y2 (enExample
Inventor
相原　竜三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP10429482U priority Critical patent/JPS5910842U/ja
Publication of JPS5910842U publication Critical patent/JPS5910842U/ja
Application granted granted Critical
Publication of JPS636846Y2 publication Critical patent/JPS636846Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10429482U 1982-07-09 1982-07-09 金属イオン源 Granted JPS5910842U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10429482U JPS5910842U (ja) 1982-07-09 1982-07-09 金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10429482U JPS5910842U (ja) 1982-07-09 1982-07-09 金属イオン源

Publications (2)

Publication Number Publication Date
JPS5910842U true JPS5910842U (ja) 1984-01-23
JPS636846Y2 JPS636846Y2 (enExample) 1988-02-26

Family

ID=30244950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10429482U Granted JPS5910842U (ja) 1982-07-09 1982-07-09 金属イオン源

Country Status (1)

Country Link
JP (1) JPS5910842U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009245767A (ja) * 2008-03-31 2009-10-22 Kobe Steel Ltd イオン源、及びこのイオン源の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009245767A (ja) * 2008-03-31 2009-10-22 Kobe Steel Ltd イオン源、及びこのイオン源の製造方法

Also Published As

Publication number Publication date
JPS636846Y2 (enExample) 1988-02-26

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