JPS6367247U - - Google Patents

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Publication number
JPS6367247U
JPS6367247U JP16133686U JP16133686U JPS6367247U JP S6367247 U JPS6367247 U JP S6367247U JP 16133686 U JP16133686 U JP 16133686U JP 16133686 U JP16133686 U JP 16133686U JP S6367247 U JPS6367247 U JP S6367247U
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JP
Japan
Prior art keywords
wafer
section
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rotating member
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Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16133686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517885Y2 (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16133686U priority Critical patent/JPH0517885Y2/ja
Publication of JPS6367247U publication Critical patent/JPS6367247U/ja
Application granted granted Critical
Publication of JPH0517885Y2 publication Critical patent/JPH0517885Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP16133686U 1986-10-20 1986-10-20 Expired - Lifetime JPH0517885Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16133686U JPH0517885Y2 (enEXAMPLES) 1986-10-20 1986-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16133686U JPH0517885Y2 (enEXAMPLES) 1986-10-20 1986-10-20

Publications (2)

Publication Number Publication Date
JPS6367247U true JPS6367247U (enEXAMPLES) 1988-05-06
JPH0517885Y2 JPH0517885Y2 (enEXAMPLES) 1993-05-13

Family

ID=31087556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16133686U Expired - Lifetime JPH0517885Y2 (enEXAMPLES) 1986-10-20 1986-10-20

Country Status (1)

Country Link
JP (1) JPH0517885Y2 (enEXAMPLES)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03290946A (ja) * 1990-03-30 1991-12-20 Tokyo Electron Ltd 処理装置および処理方法およびレジスト処理装置
CN102690052A (zh) * 2012-05-25 2012-09-26 熊进 一种玻璃下料装置
JP2013149703A (ja) * 2012-01-18 2013-08-01 Nippon Steel & Sumikin Fine Technology Co Ltd ウエハ搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03290946A (ja) * 1990-03-30 1991-12-20 Tokyo Electron Ltd 処理装置および処理方法およびレジスト処理装置
JP2013149703A (ja) * 2012-01-18 2013-08-01 Nippon Steel & Sumikin Fine Technology Co Ltd ウエハ搬送装置
CN102690052A (zh) * 2012-05-25 2012-09-26 熊进 一种玻璃下料装置

Also Published As

Publication number Publication date
JPH0517885Y2 (enEXAMPLES) 1993-05-13

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