JPS6361140U - - Google Patents

Info

Publication number
JPS6361140U
JPS6361140U JP1986155963U JP15596386U JPS6361140U JP S6361140 U JPS6361140 U JP S6361140U JP 1986155963 U JP1986155963 U JP 1986155963U JP 15596386 U JP15596386 U JP 15596386U JP S6361140 U JPS6361140 U JP S6361140U
Authority
JP
Japan
Prior art keywords
arm
plate
moving part
disposed
carriage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986155963U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986155963U priority Critical patent/JPS6361140U/ja
Priority to US07/063,956 priority patent/US4778331A/en
Publication of JPS6361140U publication Critical patent/JPS6361140U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y10S414/138—Wafers positioned vertically within cassette

Description

【図面の簡単な説明】
図は本考案の一実施例を示し、第１図は搬送装
置の外側カバーを外した状態の正面図、第２図は
同平面図、第３図は同右側面図、第４図は第１図
のＡ−Ａ断面図、第５図は第１図の中央部縦断面
図、第６図は水平移動部の拡大水平断面図、第７
図は同水平移動部の拡大縦断面図、第８図は搬送
装置の平面配置図、第９図は同装置の正面配置図
、第１０図は作動状態を示す装置上部の正面図、
第１１図はカセツト用アームの動作を示す正面図
である。 ２……底板、３……上板、４……ガイド棒、５
……可動板、７……筒体、８……ねじ付シヤフト
、１４……水平移動部、２７……キヤリツジ、３
２……回動アーム、３２ａ……ウエーハ用アーム
、３２ｂ……カセツト用アーム、３３……プーリ
、３４……ワイヤ。

Claims (1)

    【実用新案登録請求の範囲】
  1. シリコンウエーハ又はシリコンウエーハを収納
    したカセツトをアーム上に載せて任意の位置に搬
    送する搬送装置であつて、複数のガイド棒で上下
    に連結された上板と底板の間にねじ付シヤフトが
    回転駆動可能に立設され、該上板と底板の間に可
    動板が前記ガイド棒により上下摺動可能にガイド
    され且つ前記ねじ付シヤフトの回転により上下動
    するように配設され、該可動板上には前記上板を
    貫通して上方に突出する筒体が回転駆動可能に立
    設され、該筒体の上端に水平移動部が固定され、
    該水平移動部上には回動アームを設けたキヤリツ
    ジが水平移動可能に配設され、該水平移動部内に
    軸支したプーリにかけ渡した駆動用のワイヤが該
    キヤリツジに係止され、前記回動アームはウエー
    ハ用アームとカセツト用アームを直角位置に有し
    前記キヤリツジ上で上下に約９０度の範囲で回動
    可能に枢支されたことを特徴とするシリコンウエ
    ーハ用搬送装置。
JP1986155963U 1986-10-11 1986-10-11 Pending JPS6361140U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986155963U JPS6361140U (ja) 1986-10-11 1986-10-11
US07/063,956 US4778331A (en) 1986-10-11 1987-06-19 Carrier system for silicon wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986155963U JPS6361140U (ja) 1986-10-11 1986-10-11

Publications (1)

Publication Number Publication Date
JPS6361140U true JPS6361140U (ja) 1988-04-22

Family

ID=15617363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986155963U Pending JPS6361140U (ja) 1986-10-11 1986-10-11

Country Status (2)

Country Link
US (1) US4778331A (ja)
JP (1) JPS6361140U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188304A (ja) * 1992-12-17 1994-07-08 Furukawa Electric Co Ltd:The リングフレーム自動洗浄装置

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3637880C2 (de) * 1986-11-06 1994-09-01 Meissner & Wurst Transportierbares Behältnis zur Handhabung von Halbleiterelementen während ihrer Herstellung sowie Verfahren zur partikelfreien Übergabe von Produkten
EP0302542B1 (en) * 1987-07-14 1994-01-26 Koninklijke Philips Electronics N.V. Apparatus for the transport of carriers from and to a positioning device, and selection device for use in such an apparatus
KR0133676B1 (ko) * 1987-12-07 1998-04-23 후세 노보루 웨이퍼 이동 교체 장치 및 방법
US5112205A (en) * 1989-05-15 1992-05-12 Sony Corporation Optical-disk manufacturing apparatus
US5154730A (en) * 1991-05-17 1992-10-13 Materials Research Corporation Semiconductor wafer processing module having an inclined rotating wafer handling turret and a method of using the module
US6473157B2 (en) * 1992-02-07 2002-10-29 Nikon Corporation Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrate
US5498118A (en) * 1992-02-07 1996-03-12 Nikon Corporation Apparatus for and method of carrying a substrate
TW245823B (ja) * 1992-10-05 1995-04-21 Tokyo Electron Co Ltd
US5295777A (en) * 1992-12-23 1994-03-22 Materials Research Corporation Wafer transport module with rotatable and horizontally extendable wafer holder
JPH08288355A (ja) * 1995-04-12 1996-11-01 Nikon Corp 基板搬送装置
US5741109A (en) * 1995-07-07 1998-04-21 Pri Automation, Inc. Wafer transfer system having vertical lifting capability
US5615988A (en) * 1995-07-07 1997-04-01 Pri Automation, Inc. Wafer transfer system having rotational capability
US5647718A (en) * 1995-07-07 1997-07-15 Pri Automation, Inc. Straight line wafer transfer system
US5746565A (en) * 1996-01-22 1998-05-05 Integrated Solutions, Inc. Robotic wafer handler
US6036426A (en) * 1996-01-26 2000-03-14 Creative Design Corporation Wafer handling method and apparatus
US6139245A (en) * 1997-07-11 2000-10-31 Brooks Automation Inc. Robot arm relocation system
US5915910A (en) * 1997-08-29 1999-06-29 Daitron, Inc. Semiconductor wafer transfer method and apparatus
US6183186B1 (en) * 1997-08-29 2001-02-06 Daitron, Inc. Wafer handling system and method
US20050008467A1 (en) * 2003-07-11 2005-01-13 Rich Huang Load port transfer device
JP4342928B2 (ja) * 2003-12-25 2009-10-14 株式会社森精機製作所 工作機械の工具交換装置
US20070231108A1 (en) * 2006-04-04 2007-10-04 Applied Materials, Inc. Method and apparatus for transferring wafers
CN104260077A (zh) * 2014-09-19 2015-01-07 常熟市惠一机电有限公司 一种横行伺服单截机械手
US20180261490A1 (en) * 2015-05-19 2018-09-13 Verselus, Llc Apparatus for transporting an object from one location to another location in a manufacturing environment

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3750804A (en) * 1969-03-07 1973-08-07 Triax Co Load handling mechanism and automatic storage system
US3825245A (en) * 1972-04-24 1974-07-23 Kearney & Trecker Corp Workpiece changer mechanism for a machine tool
US3854605A (en) * 1974-02-25 1974-12-17 Ibm Article conveying
JPS571116Y2 (ja) * 1978-01-31 1982-01-08
JPS5918194B2 (ja) * 1978-01-31 1984-04-25 ファナック株式会社 工業用ロボット制御方法
JPS5548598A (en) * 1978-09-29 1980-04-07 Fujitsu Fanuc Ltd Load reducing device of industrial robot
US4419039A (en) * 1981-03-04 1983-12-06 Bengtsson Bengt A Apparatus for loading objects
FR2501563B1 (fr) * 1981-03-10 1986-07-18 Sormel Sa Manipulateur automatique
US4507044A (en) * 1981-12-08 1985-03-26 Zymark Corporation Robot and control system
JPS58149189A (ja) * 1982-03-01 1983-09-05 セイコーインスツルメンツ株式会社 工業用ロボツトの旋回昇降機構
WO1984000915A1 (en) * 1982-09-07 1984-03-15 Valeron Corp Tool changer mechanism for machining centers
US4651863A (en) * 1983-08-31 1987-03-24 Westinghouse Electric Corp. System for assembling electronic component kits
JPS61279522A (ja) * 1985-06-05 1986-12-10 Ichikou Eng Kk 取出機用昇降装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188304A (ja) * 1992-12-17 1994-07-08 Furukawa Electric Co Ltd:The リングフレーム自動洗浄装置

Also Published As

Publication number Publication date
US4778331A (en) 1988-10-18

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