JPS6360529B2 - - Google Patents

Info

Publication number
JPS6360529B2
JPS6360529B2 JP54016425A JP1642579A JPS6360529B2 JP S6360529 B2 JPS6360529 B2 JP S6360529B2 JP 54016425 A JP54016425 A JP 54016425A JP 1642579 A JP1642579 A JP 1642579A JP S6360529 B2 JPS6360529 B2 JP S6360529B2
Authority
JP
Japan
Prior art keywords
solvent
inert gas
resist
dispense
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54016425A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55108741A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1642579A priority Critical patent/JPS55108741A/ja
Publication of JPS55108741A publication Critical patent/JPS55108741A/ja
Publication of JPS6360529B2 publication Critical patent/JPS6360529B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1642579A 1979-02-15 1979-02-15 Resist coating device Granted JPS55108741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1642579A JPS55108741A (en) 1979-02-15 1979-02-15 Resist coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1642579A JPS55108741A (en) 1979-02-15 1979-02-15 Resist coating device

Publications (2)

Publication Number Publication Date
JPS55108741A JPS55108741A (en) 1980-08-21
JPS6360529B2 true JPS6360529B2 (enrdf_load_stackoverflow) 1988-11-24

Family

ID=11915876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1642579A Granted JPS55108741A (en) 1979-02-15 1979-02-15 Resist coating device

Country Status (1)

Country Link
JP (1) JPS55108741A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012175A (ja) * 1983-06-30 1985-01-22 Tokyo Denshi Kagaku Kabushiki 塗布液の供給方法
JPH0194620A (ja) * 1987-10-06 1989-04-13 Mitsubishi Electric Corp スピン塗布装置
JP2803859B2 (ja) * 1989-09-29 1998-09-24 株式会社日立製作所 流動体供給装置およびその制御方法
JP4496833B2 (ja) * 2004-04-22 2010-07-07 凸版印刷株式会社 レジスト吐出装置及びそれを用いたレジスト塗布方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (enrdf_load_stackoverflow) * 1973-11-16 1975-07-01
JPS5653351Y2 (enrdf_load_stackoverflow) * 1976-09-06 1981-12-11

Also Published As

Publication number Publication date
JPS55108741A (en) 1980-08-21

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