JPS55108741A - Resist coating device - Google Patents
Resist coating deviceInfo
- Publication number
- JPS55108741A JPS55108741A JP1642579A JP1642579A JPS55108741A JP S55108741 A JPS55108741 A JP S55108741A JP 1642579 A JP1642579 A JP 1642579A JP 1642579 A JP1642579 A JP 1642579A JP S55108741 A JPS55108741 A JP S55108741A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- pipe
- dispence
- nozzle
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To prevent the hardening of resist in a pipe or a nozzle for dispence by installing a soluvent supplying device for dissolving resist in a resist coating device which is used for semiconductor manufacturing process.
CONSTITUTION: Through a solenoid valve 8, a resist supplying pump 6, a pipe for dispence 5 and a nozzle for dispence 4 from a resist supply bin 7, a resist dropped in a semiconductor subtrate 1 which is held by a freely rotating spinner head 3 in a container 2. After resist coating, the solenoid valve 8 is switched over and a solvent for resist and non-activated gas for drying in a reservoir bin 10 is supplied to a pipe 5 and a nozzle 4 through a pipe 9 and washing and drying are made. The solvent and non-activated gas are supplied from a solvent supply bin 12 and a non-activated gas supply device 13 by switching the solenoid valve 11.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1642579A JPS55108741A (en) | 1979-02-15 | 1979-02-15 | Resist coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1642579A JPS55108741A (en) | 1979-02-15 | 1979-02-15 | Resist coating device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55108741A true JPS55108741A (en) | 1980-08-21 |
JPS6360529B2 JPS6360529B2 (en) | 1988-11-24 |
Family
ID=11915876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1642579A Granted JPS55108741A (en) | 1979-02-15 | 1979-02-15 | Resist coating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55108741A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6012175A (en) * | 1983-06-30 | 1985-01-22 | Tokyo Denshi Kagaku Kabushiki | Coating liquid supplying method |
JPH0194620A (en) * | 1987-10-06 | 1989-04-13 | Mitsubishi Electric Corp | Spin applicator |
US5134962A (en) * | 1989-09-29 | 1992-08-04 | Hitachi, Ltd. | Spin coating apparatus |
JP2005311098A (en) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | Resist-discharging device, resist-coating apparatus using the same and resist-coating method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5081067A (en) * | 1973-11-16 | 1975-07-01 | ||
JPS5337576U (en) * | 1976-09-06 | 1978-04-01 |
-
1979
- 1979-02-15 JP JP1642579A patent/JPS55108741A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5081067A (en) * | 1973-11-16 | 1975-07-01 | ||
JPS5337576U (en) * | 1976-09-06 | 1978-04-01 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6012175A (en) * | 1983-06-30 | 1985-01-22 | Tokyo Denshi Kagaku Kabushiki | Coating liquid supplying method |
JPH0152065B2 (en) * | 1983-06-30 | 1989-11-07 | Tokyo Ohka Kogyo Co Ltd | |
JPH0194620A (en) * | 1987-10-06 | 1989-04-13 | Mitsubishi Electric Corp | Spin applicator |
US5134962A (en) * | 1989-09-29 | 1992-08-04 | Hitachi, Ltd. | Spin coating apparatus |
JP2005311098A (en) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | Resist-discharging device, resist-coating apparatus using the same and resist-coating method |
Also Published As
Publication number | Publication date |
---|---|
JPS6360529B2 (en) | 1988-11-24 |
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