JPS5081067A - - Google Patents
Info
- Publication number
- JPS5081067A JPS5081067A JP12825473A JP12825473A JPS5081067A JP S5081067 A JPS5081067 A JP S5081067A JP 12825473 A JP12825473 A JP 12825473A JP 12825473 A JP12825473 A JP 12825473A JP S5081067 A JPS5081067 A JP S5081067A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12825473A JPS5081067A (en) | 1973-11-16 | 1973-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12825473A JPS5081067A (en) | 1973-11-16 | 1973-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5081067A true JPS5081067A (en) | 1975-07-01 |
Family
ID=14980293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12825473A Pending JPS5081067A (en) | 1973-11-16 | 1973-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5081067A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55108741A (en) * | 1979-02-15 | 1980-08-21 | Pioneer Electronic Corp | Resist coating device |
| JPS57162666A (en) * | 1981-03-30 | 1982-10-06 | Tokyo Denshi Kagaku Kabushiki | Liquid dropping device |
| JPS57173839A (en) * | 1981-04-21 | 1982-10-26 | Oki Electric Ind Co Ltd | Resist coating device |
| JPS58214373A (en) * | 1982-05-24 | 1983-12-13 | イ−ストマン コダック カンパニ− | Device for applying liquid |
| JPS6122627A (en) * | 1984-07-10 | 1986-01-31 | Mitsubishi Electric Corp | Photo-sensitive resin coating nozzle |
| JPS62190338U (en) * | 1986-05-27 | 1987-12-03 | ||
| JPS6437838A (en) * | 1987-08-03 | 1989-02-08 | Nec Corp | Chemical liquid coater |
| JPH0246730A (en) * | 1988-08-08 | 1990-02-16 | Nec Corp | Disperser for formation of coat film |
| JPH0286827A (en) * | 1989-07-07 | 1990-03-27 | Hitachi Ltd | Liquid treating device |
| JPH0286826A (en) * | 1989-07-07 | 1990-03-27 | Hitachi Ltd | Liquid treating device |
| JPH03139832A (en) * | 1989-10-25 | 1991-06-14 | Ebara Corp | Jet scrubber |
| JPH03143558A (en) * | 1989-10-30 | 1991-06-19 | Ebara Corp | Jet scrubber |
| JPH03148825A (en) * | 1989-11-06 | 1991-06-25 | Ebara Corp | Jet scrubber |
-
1973
- 1973-11-16 JP JP12825473A patent/JPS5081067A/ja active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6360529B2 (en) * | 1979-02-15 | 1988-11-24 | ||
| JPS55108741A (en) * | 1979-02-15 | 1980-08-21 | Pioneer Electronic Corp | Resist coating device |
| JPS57162666A (en) * | 1981-03-30 | 1982-10-06 | Tokyo Denshi Kagaku Kabushiki | Liquid dropping device |
| JPH0117748B2 (en) * | 1981-03-30 | 1989-03-31 | Tokyo Ohka Kogyo Co Ltd | |
| JPS57173839A (en) * | 1981-04-21 | 1982-10-26 | Oki Electric Ind Co Ltd | Resist coating device |
| JPS58214373A (en) * | 1982-05-24 | 1983-12-13 | イ−ストマン コダック カンパニ− | Device for applying liquid |
| JPS6122627A (en) * | 1984-07-10 | 1986-01-31 | Mitsubishi Electric Corp | Photo-sensitive resin coating nozzle |
| JPH0237687B2 (en) * | 1984-07-10 | 1990-08-27 | Mitsubishi Electric Corp | |
| JPS62190338U (en) * | 1986-05-27 | 1987-12-03 | ||
| JPS6437838A (en) * | 1987-08-03 | 1989-02-08 | Nec Corp | Chemical liquid coater |
| JPH0246730A (en) * | 1988-08-08 | 1990-02-16 | Nec Corp | Disperser for formation of coat film |
| JPH0286827A (en) * | 1989-07-07 | 1990-03-27 | Hitachi Ltd | Liquid treating device |
| JPH0286826A (en) * | 1989-07-07 | 1990-03-27 | Hitachi Ltd | Liquid treating device |
| JPH03139832A (en) * | 1989-10-25 | 1991-06-14 | Ebara Corp | Jet scrubber |
| JPH03143558A (en) * | 1989-10-30 | 1991-06-19 | Ebara Corp | Jet scrubber |
| JPH03148825A (en) * | 1989-11-06 | 1991-06-25 | Ebara Corp | Jet scrubber |